A radiation detection device includes a detection element including a substrate having a first surface and a second surface, a first electrode on the first surface, a second electrode adjacent to the first electrode in a first direction, a third electrode adjacent to the first electrode in a second direction; a fourth electrode adjacent to the third electrode in the first direction and adjacent to the second electrode in the second direction and a fifth electrode on the first surface and between the first and second electrode, between the first and third electrode, between the second and fourth electrode, and between the third and fourth electrode; a wiring layer on the second surface and including a first wiring, a second wiring, a third wiring, and a fourth wiring; and a circuit element opposite to the wiring layer and connected to the first to fourth wiring.

A method of measuring ionizing radiation may include the steps of: a) creating charged particles; b) causing the charged particles to generate the electrons; c) collecting at least a portion of the multiplied free electrons using at least two anode pads provided within the chamber, each anode pad producing a corresponding anode output signal, to provide higher sensitivity; and d) recording each anode output signal.

A method of measuring ionizing radiation may include the steps of: a) creating charged particles; b) causing the charged particles to generate the electrons; c) collecting at least a portion of the multiplied free electrons using at least two anode pads provided within the chamber, each anode pad producing a corresponding anode output signal, to provide higher sensitivity; and d) recording each anode output signal.

An ion filter used for an electron multiplier includes an insulating substrate; a first conductive layer formed on one main surface of the substrate; and a second conductive layer formed on another main surface of the substrate. The ion filter has a plurality of through-holes formed along a thickness direction of the substrate. The one main surface of the substrate is disposed at a downstream side in a moving direction of electrons in a chamber of the electron multiplier and the other main surface of the substrate is disposed at an upstream side in the moving direction of electrons in the chamber of the electron multiplier. A first thickness of the first conductive layer formed on the one main surface of the substrate is thicker than a second thickness of the second conductive layer on the other main surface of the substrate.

An ion filter used for an electron multiplier includes an insulating substrate; a first conductive layer formed on one main surface of the substrate; and a second conductive layer formed on another main surface of the substrate. The ion filter has a plurality of through-holes formed along a thickness direction of the substrate. The one main surface of the substrate is disposed at a downstream side in a moving direction of electrons in a chamber of the electron multiplier and the other main surface of the substrate is disposed at an upstream side in the moving direction of electrons in the chamber of the electron multiplier. A first thickness of the first conductive layer formed on the one main surface of the substrate is thicker than a second thickness of the second conductive layer on the other main surface of the substrate.

A detection element includes an exposed electrode on the first surface of an insulating substrate, the exposed electrode including first exposed electrode, second exposed electrode, third exposed electrode, and fourth exposed electrode provided; a first electrode pattern provided on a side opposite to the first surface, the first electrode pattern including a pattern connected to the first exposed electrode and the second exposed electrode, a pattern connected to the third exposed electrode and the fourth exposed electrode, a second electrode pattern having a first exposed portion and a pattern provided along the second direction, and a third electrode pattern having a second exposed portion and a pattern provided along the third direction, provided so as to sandwich the third electrode pattern between the first electrode pattern and the second electrode pattern.

A detection element includes an exposed electrode on the first surface of an insulating substrate, the exposed electrode including first exposed electrode, second exposed electrode, third exposed electrode, and fourth exposed electrode provided; a first electrode pattern provided on a side opposite to the first surface, the first electrode pattern including a pattern connected to the first exposed electrode and the second exposed electrode, a pattern connected to the third exposed electrode and the fourth exposed electrode, a second electrode pattern having a first exposed portion and a pattern provided along the second direction, and a third electrode pattern having a second exposed portion and a pattern provided along the third direction, provided so as to sandwich the third electrode pattern between the first electrode pattern and the second electrode pattern.

A radiation detection element includes a base material, a first electrode, a second electrode, a third electrode, a fourth electrode, a fifth electrode, a first external terminal, a second external terminal, a third external terminal, and a fourth external terminal. Each of the first external terminal, the second external terminal, the third external terminal, and the fourth external terminal is a solder ball, and the first external terminal, the second external terminal, the third external terminal, and the fourth external terminal are insulated from each other. A region provided on the first electrode, the second electrode, the third electrode, the fourth electrode, and the fifth electrode overlaps at least one of the first external terminal, the second external terminal, the third external terminal, and the fourth external terminal in a view vertical to the first surface side of the base material.

A radiation detection element includes a base material, a first electrode, a second electrode, a third electrode, a fourth electrode, a fifth electrode, a first external terminal, a second external terminal, a third external terminal, and a fourth external terminal. Each of the first external terminal, the second external terminal, the third external terminal, and the fourth external terminal is a solder ball, and the first external terminal, the second external terminal, the third external terminal, and the fourth external terminal are insulated from each other. A region provided on the first electrode, the second electrode, the third electrode, the fourth electrode, and the fifth electrode overlaps at least one of the first external terminal, the second external terminal, the third external terminal, and the fourth external terminal in a view vertical to the first surface side of the base material.

A radiation detection device includes a detection element including a substrate having a first surface and a second surface, a first electrode on the first surface, a second electrode adjacent to the first electrode in a first direction, a third electrode adjacent to the first electrode in a second direction; a fourth electrode adjacent to the third electrode in the first direction and adjacent to the second electrode in the second direction and a fifth electrode on the first surface and between the first and second electrode, between the first and third electrode, between the second and fourth electrode, and between the third and fourth electrode; a wiring layer on the second surface and including a first wiring, a second wiring, a third wiring, and a fourth wiring; and a circuit element opposite to the wiring layer and connected to the first to fourth wiring.