H ELECTRICITY
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H01 ELECTRIC ELEMENTS
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H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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49/00 Particle spectrometers or separator tubes
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H01J49/02 Details
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H01J49/10 Ion sources; Ion guns
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H01J49/105 using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
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