Patent classifications
H01J49/46
VARIABLE REDUCTION RATIO SPHERICAL ABERRATION CORRECTION ELECTROSTATIC LENS, WIDE ANGLE ENERGY ANALYZER, AND TWO-DIMENSIONAL ELECTRON SPECTROMETER
Provided is a compact two-dimensional electron spectrometer that is capable of variably adjusting the deceleration ratio over a wide range, and performing simultaneous measurement of the two-dimensional emission angle distribution with a high energy resolution over a wide solid angle of acquisition. The two-dimensional electron spectrometer is configured from: a variable deceleration ratio spherical aberration correction electrostatic lens; a cylindrical mirror type energy analyzer or a wide angle energy analyzer; and a projection lens. The variable deceleration ratio spherical aberration correction electrostatic lens is configured from: an electrostatic lens that consists of an axially symmetric spherical mesh having a concave shape with respect to a point source, and one or a plurality of axially symmetrical electrodes, and that adjusts the spherical aberration of charged particles generated from the point source; and an axially symmetric deceleration field generating electrode that is placed coaxially with the electrostatic lens.
Energy filter and charged particle beam apparatus
An energy filter has a plurality of sector magnets which are configured symmetrically with respect to a symmetry plane, and forms a real image on the symmetry plane. The energy filter include: an entrance aperture provided with a slit having a longitudinal direction in a direction perpendicular to an energy dispersion direction; and a hexapole and a quadrupole disposed on the symmetry plane.
Momentum-Resolving Photoelectron Spectrometer and Method for Momentum-resolved Photoelectron Spectroscopy
The invention relates to the field of physics and relates to an impulse-resolving photo-electron spectrometer, by means of which the physical properties can be determined. The aim of the invention is to provide an impulse-resolving photo-electron spectrometer enabling the device components to have a simple structure with a significantly reduced overall volume. The aim of the invention is achieved by means of an impulse-resolving photo-electron spectrometer comprising components arranged one behind the other in the direction of the optical axis at least in a vacuum and which are each at least one electron emission sample and a focusing system, wherein the focusing system consists of at least one electron lens and at least one detector, wherein the electron lens consists of three cylindrical elements, wherein the first cylindrical element has a potential=0 and the two subsequently arranged cylindrical elements have a potential of0, and wherein the detector is one or more spatially resolved detectors which are arranged in the focal plane of the electron lens.
Momentum-Resolving Photoelectron Spectrometer and Method for Momentum-resolved Photoelectron Spectroscopy
The invention relates to the field of physics and relates to an impulse-resolving photo-electron spectrometer, by means of which the physical properties can be determined. The aim of the invention is to provide an impulse-resolving photo-electron spectrometer enabling the device components to have a simple structure with a significantly reduced overall volume. The aim of the invention is achieved by means of an impulse-resolving photo-electron spectrometer comprising components arranged one behind the other in the direction of the optical axis at least in a vacuum and which are each at least one electron emission sample and a focusing system, wherein the focusing system consists of at least one electron lens and at least one detector, wherein the electron lens consists of three cylindrical elements, wherein the first cylindrical element has a potential=0 and the two subsequently arranged cylindrical elements have a potential of0, and wherein the detector is one or more spatially resolved detectors which are arranged in the focal plane of the electron lens.
Mass spectrometer
The mass spectrometer includes an ionization unit, an ion transport unit, and a mass separation unit that separates transported ions according to a mass-to-charge ratio. The ion transport unit includes a transport electrode member, a voltage generator that applies a voltage to the transport electrode member, and a voltage controller that changes a voltage applied to the transport electrode member while ionization is performed. The voltage controller switches between a first voltage state in which charged particles generated in the ionization unit can enter the mass separation unit, and a second voltage state in which the charged particles cannot enter the mass separation unit, and switches a voltage state of the transport electrode member between the first voltage state and the second voltage state.
Energy Filter and Charged Particle Beam Apparatus
An energy filter has a plurality of sector magnets which are configured symmetrically with respect to a symmetry plane, and forms a real image on the symmetry plane. The energy filter include: an entrance aperture provided with a slit having a longitudinal direction in a direction perpendicular to an energy dispersion direction; and a hexapole and a quadrupole disposed on the symmetry plane.
Closed path ion mobility spectrometer having a common ion inlet and outlet
An ion mobility spectrometer includes a drift tube responsive to application of at least a first voltage to establish a first electric field therein configured to cause ions within the drift tube to move along and about the drift tube while separating from one another as a function of ion mobility, and a transition region coupled to opposed ends of the first drift tube such that the drift tube and the transition region together define a closed path. The transition region is responsive to application of at least a second voltage to cause the ions to move along and about the closed path, to application of at least a third voltage to selectively pass ions into the drift tube and to application of at least a fourth voltage to selectively pass ions out of the drift tube.
Closed path ion mobility spectrometer having a common ion inlet and outlet
An ion mobility spectrometer includes a drift tube responsive to application of at least a first voltage to establish a first electric field therein configured to cause ions within the drift tube to move along and about the drift tube while separating from one another as a function of ion mobility, and a transition region coupled to opposed ends of the first drift tube such that the drift tube and the transition region together define a closed path. The transition region is responsive to application of at least a second voltage to cause the ions to move along and about the closed path, to application of at least a third voltage to selectively pass ions into the drift tube and to application of at least a fourth voltage to selectively pass ions out of the drift tube.
DEVICE AND METHOD FOR ELECTRON TRANSFER FROM A SAMPLE TO AN ENERGY ANALYZER AND ELECTRON SPECTROMETER DEVICE
An electron imaging apparatus 100 is disclosed, which is configured for an electron transfer along an electron-optical axis OA of an electron 2 emitting sample 1 to an energy analyzer apparatus 200, and comprises a sample-side first lens group 10, an analyzer-side second lens group 30 and a deflector device 20, configured to deflect the electrons 2 in an exit plane of the electron imaging apparatus 100 in a deflection direction perpendicular to the electron-optical axis OA. An electron spectrometer apparatus, an electron transfer method and an electron spectrometry method are also described.
DEVICE AND METHOD FOR ELECTRON TRANSFER FROM A SAMPLE TO AN ENERGY ANALYZER AND ELECTRON SPECTROMETER DEVICE
An electron imaging apparatus 100 is disclosed, which is configured for an electron transfer along an electron-optical axis OA of an electron 2 emitting sample 1 to an energy analyzer apparatus 200, and comprises a sample-side first lens group 10, an analyzer-side second lens group 30 and a deflector device 20, configured to deflect the electrons 2 in an exit plane of the electron imaging apparatus 100 in a deflection direction perpendicular to the electron-optical axis OA. An electron spectrometer apparatus, an electron transfer method and an electron spectrometry method are also described.