An energy spectrometer with dynamic focus for a transmission electron microscope (TEM) is disclosed herein. An example energy spectrometer and TEM at least includes a charged particle column including a projection system arranged after a sample plane, the projection system is operated in a first configuration; an energy spectrometer coupled to the charged particle column to acquire one or more energy loss spectra. The energy spectrometer including a dispersive element, a bias tube, optics for magnifying the energy loss spectrum and for correcting aberrations, and a detector arranged conjugate to a spectrum plane of the energy spectrometer, wherein the energy spectrometer further includes an optical element electrically biased to refocus at least a portion of a spectrum onto the detector, and wherein the value of the electrical bias is at least partially based on the first configuration of the charged particle column.

An energy spectrometer with dynamic focus for a transmission electron microscope (TEM) is disclosed herein. An example energy spectrometer and TEM at least includes a charged particle column including a projection system arranged after a sample plane, the projection system is operated in a first configuration; an energy spectrometer coupled to the charged particle column to acquire one or more energy loss spectra. The energy spectrometer including a dispersive element, a bias tube, optics for magnifying the energy loss spectrum and for correcting aberrations, and a detector arranged conjugate to a spectrum plane of the energy spectrometer, wherein the energy spectrometer further includes an optical element electrically biased to refocus at least a portion of a spectrum onto the detector, and wherein the value of the electrical bias is at least partially based on the first configuration of the charged particle column.

A hybrid ion mobility spectrometer includes a single-pass drift tube having an ion inlet and an ion outlet, a multiple-pass drift tube having an ion inlet and an ion outlet each coupled to the single pass drift tube between the ion inlet and the ion outlet thereof, and at least one ion steering channel controllable to selectively pass ions traveling through the single-pass drift tube into the multiple-pass drift tube via the ion inlet of the multiple-pass drift tube and to selectively pass ions traveling through the multiple-pass drift tube into the single-pass drift tube via the ion outlet of the multiple-pass drift tube. The single-pass drift tube separates in time ions traveling therethrough according to a first function of ion mobility, and the multiple-pass drift tube separates in time ions traveling one or more times therethrough according to the first or a second function of ion mobility.

A hybrid ion mobility spectrometer includes a single-pass drift tube having an ion inlet and an ion outlet, a multiple-pass drift tube having an ion inlet and an ion outlet each coupled to the single pass drift tube between the ion inlet and the ion outlet thereof, and at least one ion steering channel controllable to selectively pass ions traveling through the single-pass drift tube into the multiple-pass drift tube via the ion inlet of the multiple-pass drift tube and to selectively pass ions traveling through the multiple-pass drift tube into the single-pass drift tube via the ion outlet of the multiple-pass drift tube. The single-pass drift tube separates in time ions traveling therethrough according to a first function of ion mobility, and the multiple-pass drift tube separates in time ions traveling one or more times therethrough according to the first or a second function of ion mobility.

An electron imaging apparatus 100 is disclosed, which is configured for an electron transfer along an electron-optical axis OA of an electron 2 emitting sample 1 to an energy analyzer apparatus 200, and comprises a sample-side first lens group 10, an analyzer-side second lens group 30 and a deflector device 20, configured to deflect the electrons 2 in an exit plane of the electron imaging apparatus 100 in a deflection direction perpendicular to the electron-optical axis OA. An electron spectrometer apparatus, an electron transfer method and an electron spectrometry method are also described.

An electron imaging apparatus 100 is disclosed, which is configured for an electron transfer along an electron-optical axis OA of an electron 2 emitting sample 1 to an energy analyzer apparatus 200, and comprises a sample-side first lens group 10, an analyzer-side second lens group 30 and a deflector device 20, configured to deflect the electrons 2 in an exit plane of the electron imaging apparatus 100 in a deflection direction perpendicular to the electron-optical axis OA. An electron spectrometer apparatus, an electron transfer method and an electron spectrometry method are also described.

The present disclosure discloses a method and a system for determining an energy spectrum of an incident electron beam. The method includes obtaining a plurality of deflection currents of a beam deflection device; for each of the plurality of deflection currents, determining an energy range of an ejected electron beam, and determining a target current of a target generated by the ejected electron beam irradiating the target, wherein the ejected electron beam is emitted from an output of the beam deflection device after the incident electron beam enters the beam deflection device. The method also includes determining the energy spectrum of the incident electron beam based on the energy ranges of the plurality of ejected electron beams and the corresponding target currents.

The invention relates to the field of physics and relates to an impulse-resolving photo-electron spectrometer, by means of which the physical properties can be determined. The aim of the invention is to provide an impulse-resolving photo-electron spectrometer enabling the device components to have a simple structure with a significantly reduced overall volume. The aim of the invention is achieved by means of an impulse-resolving photo-electron spectrometer comprising components arranged one behind the other in the direction of the optical axis at least in a vacuum and which are each at least one electron emission sample and a focusing system, wherein the focusing system consists of at least one electron lens and at least one detector, wherein the electron lens consists of three cylindrical elements, wherein the first cylindrical element has a potential=0 and the two subsequently arranged cylindrical elements have a potential of ≠0, and wherein the detector is one or more spatially resolved detectors which are arranged in the focal plane of the electron lens.

The invention relates to the field of physics and relates to an impulse-resolving photo-electron spectrometer, by means of which the physical properties can be determined. The aim of the invention is to provide an impulse-resolving photo-electron spectrometer enabling the device components to have a simple structure with a significantly reduced overall volume. The aim of the invention is achieved by means of an impulse-resolving photo-electron spectrometer comprising components arranged one behind the other in the direction of the optical axis at least in a vacuum and which are each at least one electron emission sample and a focusing system, wherein the focusing system consists of at least one electron lens and at least one detector, wherein the electron lens consists of three cylindrical elements, wherein the first cylindrical element has a potential=0 and the two subsequently arranged cylindrical elements have a potential of ≠0, and wherein the detector is one or more spatially resolved detectors which are arranged in the focal plane of the electron lens.

The invention is directed to mass spectrometer comprising an extraction system for secondary ions. The system comprises: an inner spherical deflecting sector; an outer spherical deflecting sector; a deflecting gap formed between the sectors; a housing in which the sectors are arranged. The deflecting sectors (42; 44) are biased at retarding gap (46). The system further comprises an exit disc electrode with an exit through hole centered about the exit axis, the intermediate electrode being biased at an intermediate voltage between the voltage of the housing and the average voltage of the sectors. The trajectories of the secondary ions become more parallel to the exit axis and become closer to the axis.