A plasma lamp is disclosed. The plasma lamp includes a gas containment structure configured to contain a gas and generate a plasma within the gas containment structure. The gas containment structure is formed from a glass material transparent to illumination from a pump laser and the broadband radiation emitted by the plasma. The gas containment structure includes a glass wall and the glass within the glass wall includes an OH concentration distribution that varies across a thickness of the glass wall.

A semiconductor reaction chamber includes a chamber body, a dielectric window, a gas inlet member, a carrier, an upper radio frequency assembly, and a plurality of ultraviolet light generation devices. The dielectric window is arranged at a top of the chamber body. The gas inlet member is arranged at a center position of the dielectric window and configured to introduce a process gas into the chamber body. The carrier is arranged inside the chamber body and configured to carry a to-be-processed wafer. The upper radio frequency assembly is arranged above the chamber body and configured to ionize the process gas introduced into the chamber body to generate a plasma and first ultraviolet light. The plurality of ultraviolet light generation devices is arranged between the dielectric window and the carrier and around the gas inlet member and configured to generate second ultraviolet light radiating toward the carrier.

A high-pressure discharge lamp with a burner unit which has a discharge vessel which encloses a discharge space and in which two electrodes are arranged opposite one another, wherein the electrodes each have an electrode support and an electrode tip, wherein the electrode tips are located opposite one another to form an electric arc during operation of the high-pressure discharge lamp, wherein at least a first one of the electrodes is configured as a coil electrode which has an electrode support and an electrode coil formed by a wire wound around the electrode support, wherein an exposed end of the electrode support forms the electrode tip, and wherein the electrode coil is arranged in a tip region of the electrode support adjacent to the electrode tip in the discharge space, and wherein an antenna to which voltage can be applied is routed along an outer surface of the discharge vessel. The electrode coil of the first electrode has a protrusion that protrudes beyond the outer circumference of the electrode coil toward the antenna.

The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having an inner space; a plasma source configured to apply an electric field; a first gas supply unit configured to supply a first process gas to a region to which the plasma source applies the electric field, the first process gas excited to a plasma when the first process gas is applied with an electric field of a first intensity at a first pressure atmosphere; a support unit disposed in the inner space and configured to support a substrate to be treated; and an electrodeless lamp disposed above the substrate in the inner space, and wherein the electrodeless lamp includes an electric field transmissive housing having a discharging space therein; and a discharging material including a luminous material and filling the discharging space, the discharging space of the housing being pressurized to a second pressure, and the discharging material discharging and luminating when applied with an electric field of a second intensity higher than the first intensity at a second pressure.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space, on which laser light for maintaining a plasma generated in the light-emitting gas is incident; and a charging pipe including a first end portion and a second end portion and connected to the internal space at the first end portion. The second end portion of the charging pipe is sealed by being crushed. The second end portion of the charging pipe is covered with a covering member consists of an inorganic material. The covering member is covered with a cap member consists of a metal material.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space and formed with an opening on which first light is incident and/or from which second light is emitted, wherein the first light is laser light for maintaining a plasma generated in the light-emitting gas and the second light is light from the plasma; and a window member that transmits the first light and/or the second light at the opening. The window member is joined to the housing by a joining material consisting of a material containing gold.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; and a second window portion provided to the housing and from which second light that is light from the plasma is emitted. The second window portion includes a second window member made of a material containing diamond. A protective layer made of an inorganic material is formed at least on a surface of the second window member on a side of the internal space.

An excimer lamp includes light-emitting gases containing krypton gas and chlorine gas in a sealing body composed of fused quartz glass having an absorption band at least in a wavelength band of 240 nm to 260 nm. An ultraviolet light irradiation device includes: an excimer lamp having light-emitting gases containing krypton gas and chlorine gas in a sealing body; a housing having an extraction part for extracting ultraviolet light emitted from an excimer lamp; and fused quartz glass disposed in the extraction part and having an absorption band at least in a wavelength band of 240 nm to 260 nm.

A flame detector including an ultraviolet emitter configured to emit ultraviolet light at a strike voltage less than or equal to approximately 230 volts. A method of manufacturing an ultraviolet emitter for use in a flame detector, the ultraviolet emitter including a hermetically sealed, alkali rich, ultraviolet transmissive glass envelope, the method including: (a) wrapping an envelope exterior surface with a conductive material; (b) performing a first injection of at least one non-radioactive gas into the glass envelope at a first pressure; (c) applying a voltage bias to the glass envelope; (d) baking the hermetically sealed, alkali rich, ultraviolet transmissive glass envelope at a baking temperature for a baking duration of time; (e) cooling the hermetically sealed, alkali rich, ultraviolet transmissive glass envelope to a desired temperature; and (f) performing a second injection of at least one non-radioactive gas into the glass envelope at a second pressure.