A sulfur plasma lamp has a lamp envelope of transparent or translucent glass or ceramic material. At least two silicon carbide electrodes are hermetically sealed with the lamp envelope and in contact with an interior of the lamp envelope. A quantity of sulfur within the interior of the lamp envelope is sufficient to create a sulfur plasma upon excitation. A buffer gas within the interior of the lamp envelope enables initial discharge and heating of the interior of the lamp envelope to excite the sulfur into a plasma state. More than two electrodes may be provided, and an electrical potential is created between different pairs of the electrodes at different times, thereby inducing stirring of the plasma upon excitation of the material into a plasma state.

A sulfur plasma lamp has a lamp envelope of transparent or translucent glass or ceramic material. At least two silicon carbide electrodes are hermetically sealed with the lamp envelope and in contact with an interior of the lamp envelope. A quantity of sulfur within the interior of the lamp envelope is sufficient to create a sulfur plasma upon excitation. A buffer gas within the interior of the lamp envelope enables initial discharge and heating of the interior of the lamp envelope to excite the sulfur into a plasma state. More than two electrodes may be provided, and an electrical potential is created between different pairs of the electrodes at different times, thereby inducing stirring of the plasma upon excitation of the material into a plasma state.

Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

A method of manufacturing a high-pressure discharge lamp, comprising the steps of: inserting a mount into an interior of a glass tube having an outer diameter smaller than an inner diameter of an end part of a sealed container; radially constricting the glass tube at a first position located away from a metallic foil toward a tip of an electrode; sealing the mount by a region of the glass tube that ranges from the first position to at least the other end of the metallic foil; protruding the electrode out of the glass tube located away from the first position toward the tip of the electrode to form a glass-tube air-tightly sealed mount; inserting the sealed mount into the end part of the sealed container; and radially constricting the end part of the sealed container to sealing the glass tube of the sealed mount by the end part.

A stranded outer lead wire assembly for a quartz pinch sealed lamp. The stranded outer lead wire assembly is a butt welded connection of a refractory metal outer pinch lead (e.g., molybdenum solid wire) and a stranded soft metal lead wire (e.g., nickel wire strands twisted together). The assembly is prefabricated and then welded to sealing foil to make a four part foliated lead wire assembly for pinch sealing in the quartz outer jacket. The foliated lead wire assembly and a quartz envelope lamp utilizing the stranded outer lead wire assembly are also claimed. The sealing machine is adapted to protect the stranded outer lead assembly with a water cooled sleeve. In an embodiment, the outer end of the stranded lead is fused to prevent fraying.

A method of manufacturing a high-pressure discharge lamp, comprising the steps of: inserting a mount into an interior of a glass tube having an outer diameter smaller than an inner diameter of an end part of a sealed container; radially constricting the glass tube at a first position located away from a metallic foil toward a tip of an electrode; sealing the mount by a region of the glass tube that ranges from the first position to at least the other end of the metallic foil; protruding the electrode out of the glass tube located away from the first position toward the tip of the electrode to form a glass-tube air-tightly sealed mount; inserting the sealed mount into the end part of the sealed container; and radially constricting the end part of the sealed container to sealing the glass tube of the sealed mount by the end part.

Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

A stranded outer lead wire assembly for a quartz pinch sealed lamp. The stranded outer lead wire assembly is a butt welded connection of a refractory metal outer pinch lead (e.g., molybdenum solid wire) and a stranded soft metal lead wire (e.g., nickel wire strands twisted together). The assembly is prefabricated and then welded to sealing foil to make a four part foliated lead wire assembly for pinch sealing in the quartz outer jacket. The foliated lead wire assembly and a quartz envelope lamp utilizing the stranded outer lead wire assembly are also claimed. The sealing machine is adapted to protect the stranded outer lead assembly with a water cooled sleeve. In an embodiment, the outer end of the stranded lead is fused to prevent fraying.

The invention describes an electrode (1) for use in a lamp (3) comprising a quartz glass envelope (30) enclosing a chamber (31), which electrode (1) comprises a tip for extending into the chamber (31) and base for embedding in a sealed portion (33) of the quartz glass envelope (30), characterized in that the base comprises a plurality of essentially smooth concave channels (2) arranged around the body of the electrode (2) and wherein the depth (d.sub.ch) of a channel (2) is preferably at most 8 percent, more preferably at most 5 percent, most preferably at most 3 percent of a diameter (D.sub.e) of the electrode (2). The invention further describes a method of manufacturing an electrode (1) for use in a lamp (3) comprising a chamber (11) in a quartz glass envelope (30), which method comprises the step of removing material from the body of the electrode (1) to form a plurality of channels (2) around the body of the electrode such that a channel (2) comprises channel side walls (62) and an essentially concave channel floor (60), and such that depth (d.sub.ch) of a channel (2) is preferably at most 8 percent, more preferably at most 5 percent, most preferably at most 3 percent of a diameter (D.sub.e) of the electrode (2). The invention also describes a lamp (3) comprising such electrodes (1), and a method of manufacturing such a lamp (3).