An excimer lamp includes a housing portion having a sealed internal space, an internal electrode, and a discharge gas with which the internal space is filled. One end side of the internal electrode is electrically connected to a power supply member provided with a metal foil electrically connected to the internal electrode and is sealed together with the power supply member to one end side of the housing portion via a sealing portion. The other end side of the internal electrode protrudes into the internal space. A protrusion length, being a length of the internal electrode in the internal space and a length from one end of the internal space to the other end of the internal electrode, is equal to or less than a length from the other end of the internal electrode to the other end of the internal space in a direction along the axis.

A method of manufacturing a high-pressure discharge lamp, comprising the steps of: inserting a mount into an interior of a glass tube having an outer diameter smaller than an inner diameter of an end part of a sealed container; radially constricting the glass tube at a first position located away from a metallic foil toward a tip of an electrode; sealing the mount by a region of the glass tube that ranges from the first position to at least the other end of the metallic foil; protruding the electrode out of the glass tube located away from the first position toward the tip of the electrode to form a glass-tube air-tightly sealed mount; inserting the sealed mount into the end part of the sealed container; and radially constricting the end part of the sealed container to sealing the glass tube of the sealed mount by the end part.

An excimer lamp includes a housing portion having a sealed internal space, an internal electrode, and a discharge gas with which the internal space is filled. One end side of the internal electrode is electrically connected to a power supply member provided with a metal foil electrically connected to the internal electrode and is sealed together with the power supply member to one end side of the housing portion via a sealing portion. The other end side of the internal electrode protrudes into the internal space. A protrusion length, being a length of the internal electrode in the internal space and a length from one end of the internal space to the other end of the internal electrode, is equal to or less than a length from the other end of the internal electrode to the other end of the internal space in a direction along the axis.

In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.

In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.

In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.

A short-arc discharge lamp may include an arc tube section; at least one side tube section connected to at least one end of the arc tube section; at least one electrode provided inside the arc tube section; and at least one lead rod which is provided inside the at least one side tube section and which is connected to the at least one electrode; wherein the at least one lead rod has at least one metal body disposed so as to be in contact with the at least one lead rod; the at least one side tube section has at least one reduced diameter region; the at least one lead rod is supported by the at least one reduced diameter region via the at least one metal body; and at least one coating film is formed on at least one surface of the at least one metal body.

In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.

A short-arc discharge lamp may include an arc tube section; at least one side tube section connected to at least one end of the arc tube section; at least one electrode provided inside the arc tube section; and at least one lead rod which is provided inside the at least one side tube section and which is connected to the at least one electrode; wherein the at least one lead rod has at least one metal body disposed so as to be in contact with the at least one lead rod; the at least one side tube section has at least one reduced diameter region; the at least one lead rod is supported by the at least one reduced diameter region via the at least one metal body; and at least one coating film is formed on at least one surface of the at least one metal body.

A sulfur plasma lamp has a lamp envelope of transparent or translucent glass or ceramic material. At least two silicon carbide electrodes are hermetically sealed with the lamp envelope and in contact with an interior of the lamp envelope. A quantity of sulfur within the interior of the lamp envelope is sufficient to create a sulfur plasma upon excitation. A buffer gas within the interior of the lamp envelope enables initial discharge and heating of the interior of the lamp envelope to excite the sulfur into a plasma state. More than two electrodes may be provided, and an electrical potential is created between different pairs of the electrodes at different times, thereby inducing stirring of the plasma upon excitation of the material into a plasma state.