An intense pulse light (IPL) device includes a flash lamp and a light guide for guiding light from the flash lamp to an area to be treated. The flash lamp includes an anode electrode and a cathode electrode, and an envelope defining a cavity. A reflector reflects light from the flash lamp to the area to be treated. At least one electrode protector has a reflecting surface that redirects light from the electrodes toward a center of the reflector.

An intense pulse light (IPL) device includes a flash lamp and a light guide for guiding light from the flash lamp to an area to be treated. The flash lamp includes an anode electrode and a cathode electrode, and an envelope defining a cavity. A reflector reflects light from the flash lamp to the area to be treated. At least one electrode protector has a reflecting surface that redirects light from the electrodes toward a center of the reflector.

Disclosed herein are a short arc type flash lamp having high lamp starting performance and capable of reducing the diameter of its seal tube part, and a light source device thereof. The flash lamp has an electrode shaft of one of the main electrodes, and an electrode shaft of the other of the main electrodes and leads for starting auxiliary electrodes which are respectively led out from the second seal tube part, and an external trigger is disposed in a state in which it extends in the circumferential direction on the outer peripheral surface of one end side region of the second seal tube part. The light source device is structured by a concave reflection mirror disposed on the second seal tube part side of the flash lamp in a state in which a focal point of the concave reflection mirror coincides with a luminous point of the flash lamp.

Disclosed herein are a short arc type flash lamp having high lamp starting performance and capable of reducing the diameter of its seal tube part, and a light source device thereof. The flash lamp has an electrode shaft of one of the main electrodes, and an electrode shaft of the other of the main electrodes and leads for starting auxiliary electrodes which are respectively led out from the second seal tube part, and an external trigger is disposed in a state in which it extends in the circumferential direction on the outer peripheral surface of one end side region of the second seal tube part. The light source device is structured by a concave reflection mirror disposed on the second seal tube part side of the flash lamp in a state in which a focal point of the concave reflection mirror coincides with a luminous point of the flash lamp.

To provide a light irradiation device using a plurality of flash lamps in which a structure that can emit high intensity light as a whole and enables a flash lamp to be used for a practical lifetime without increasing an input current to each lamp is adopted. A light emission surface is provided on a distal end on a second electrode introducing part side of a light-emitting tube of a flash lamp including a first electrode introducing part and the second electrode introducing part, and a plurality of flash lamps are arranged in a standing manner on a top plate of a processing chamber so that the light emission surface faces the inside of the processing chamber.

A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.

A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.

A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.

A flash lamp includes a bulb including a stein, conductive linear members extending to penetrate the stein, and a trigger probe having a discharging portion configured to control discharge, wherein the conductive linear member has a lead pin and an anode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the anode are integrally formed members, wherein the conductive linear member has a lead pin and a cathode protruding toward the conductive linear member on a tip end side of the conductive linear member with respect to the lead pin, wherein the lead pin and the cathode are integrally formed members, and wherein the discharging portion of the trigger probe is disposed between the anode and the cathode.

Prior to heat treatment of a semiconductor wafer to be treated, a dummy wafer is placed on a susceptor made of quartz, and the susceptor is preheated by irradiation with light from halogen lamps. A controller controls an output from the halogen lamps, based on the temperature of the susceptor measured with a radiation thermometer. The radiation thermometer receives infrared radiation of a wavelength longer than 4 μm to measure the temperature of the susceptor. The radiation thermometer is able to receive only infrared radiation emitted from the susceptor to accurately measure the temperature of the susceptor, regardless of whether or not a wafer is held by the susceptor, because quartz is opaque in a wavelength range longer than 4 μm.