According to at least one aspect of the disclosure, an antenna is provided comprising an excitation port, and a conductive medium including a plurality of slots, each slot of the plurality of slots being electrically coupled to the excitation port, and a base portion being electrically coupled to the excitation port.

Method for multi-zone temperature control system having temperature control matrix and gate driver; N*M temperature control modules form N-row M-column matrix, power supply line, and power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate being connected with the power supply line, and the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line at same row or same column are serially connected, and connected with the power supply line.

A component supply device includes multiple magazines each provided with multiple slots accommodating the respective pallets by allotting one or more of the slots depending on the height of the accommodating section, the multiple magazines including a first magazine accommodating the pallets to be dispensed to a supply area of the components, and a second magazine accommodating the pallets to be transferred to and from the first magazine; and a control device, in a case of moving the pallet from the first magazine to the second magazine among the multiple magazines, setting a moving destination from among available slots based on the accommodation information about the second magazine taking into consideration a number of slots occupied by the pallet to be moved, and controlling the loading/unloading device so as to move the pallet to the moving destination.

According to at least one aspect of the disclosure, an antenna is provided comprising an excitation port, and a conductive medium including a plurality of slots, each slot of the plurality of slots being electrically coupled to the excitation port, and a base portion being electrically coupled to the excitation port.

The present invention discloses a multi-zone active-matrix temperature control system, the control system having a temperature control matrix and a gate driver; the temperature control matrix comprising: N*M temperature control modules forming a N-row M-column matrix, a power supply line, and a power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; a semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate, which turn on or off, being connected with the power supply line, and with the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line, of the semiconductor switches of the temperature control modules at a same row or a same column are serially connected, and connected with the power supply line. The present invention may precisely perform temperature control to each zone of the electrostatic chuck and significantly reduces the number of electrostatic chuck lead-out lines.

Method for multi-zone temperature control system having temperature control matrix and gate driver; N*M temperature control modules form N-row M-column matrix, power supply line, and power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate being connected with the power supply line, and the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line at same row or same column are serially connected, and connected with the power supply line.

Method for multi-zone temperature control system having temperature control matrix and gate driver; N*M temperature control modules form N-row M-column matrix, power supply line, and power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate being connected with the power supply line, and the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line at same row or same column are serially connected, and connected with the power supply line.