A heterogeneous cell array includes a first column of cells and a second column of cells. The first column of cells includes a first cell having a first area and a second cell having the first area. The first cell includes two fin-type field effect transistors having a first number of fins and the second cell includes two fin-type field effect transistors having the first number of fins. The second column of cells includes a third cell having a second area. The third cell is adjacent to the first cell and to the second cell, and the third cell includes two fin-type field effect transistors having a second number of fins. The second area is greater than the first area, and the second number of fins is greater than the first number of fins.

An integrated circuit may include a first active pattern group extending in a first direction in a first row and including a plurality of first active patterns overlapping each other in the first direction, the first row extending in the first direction, and a plurality of gate electrodes extending in a second direction perpendicular to the first direction in the first row. The plurality of first active patterns may include any two first active patterns that are adjacent to each other in the first direction, the two first active patterns have first and second widths in the second direction, respectively, and the first and second widths are identical or are different by a first offset or a second offset.