H01L2224/05393

Semiconductor device with composite connection structure and method for fabricating the same
11315893 · 2022-04-26 · ·

The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first insulating layer positioned above the substrate, a second insulating layer positioned above the first insulating layer, a plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and an alleviation structure positioned between the first insulating layer and the second insulating layer. The alleviation structure includes a first connecting interlayer respectively electrically coupled to the plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and a plurality of alleviation structures positioned between the plurality of first conductive features in the first insulating layer and the plurality of first conductive features in the second insulating layer, wherein a porosity of the plurality of alleviation structures is between about 25% and about 100%.

Semiconductor device with composite connection structure and method for fabricating the same
11315893 · 2022-04-26 · ·

The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first insulating layer positioned above the substrate, a second insulating layer positioned above the first insulating layer, a plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and an alleviation structure positioned between the first insulating layer and the second insulating layer. The alleviation structure includes a first connecting interlayer respectively electrically coupled to the plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and a plurality of alleviation structures positioned between the plurality of first conductive features in the first insulating layer and the plurality of first conductive features in the second insulating layer, wherein a porosity of the plurality of alleviation structures is between about 25% and about 100%.

SEMICONDUCTOR DEVICE WITH COMPOSITE CONNECTION STRUCTURE AND METHOD FOR FABRICATING THE SAME
20210305182 · 2021-09-30 ·

The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first insulating layer positioned above the substrate, a second insulating layer positioned above the first insulating layer, a plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and an alleviation structure positioned between the first insulating layer and the second insulating layer. The alleviation structure includes a first connecting interlayer respectively electrically coupled to the plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and a plurality of alleviation structures positioned between the plurality of first conductive features in the first insulating layer and the plurality of first conductive features in the second insulating layer, wherein a porosity of the plurality of alleviation structures is between about 25% and about 100%.

SEMICONDUCTOR DEVICE WITH COMPOSITE CONNECTION STRUCTURE AND METHOD FOR FABRICATING THE SAME
20210305182 · 2021-09-30 ·

The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first insulating layer positioned above the substrate, a second insulating layer positioned above the first insulating layer, a plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and an alleviation structure positioned between the first insulating layer and the second insulating layer. The alleviation structure includes a first connecting interlayer respectively electrically coupled to the plurality of first conductive features positioned in the first insulating layer and the second insulating layer, and a plurality of alleviation structures positioned between the plurality of first conductive features in the first insulating layer and the plurality of first conductive features in the second insulating layer, wherein a porosity of the plurality of alleviation structures is between about 25% and about 100%.

Reliable interconnect

Devices and methods for forming a device are disclosed. The device includes a contact region disposed over a last interconnect level of the device. The device includes a final passivation layer having at least an opening which at least partially exposes a top surface of the contact region and a buffer layer disposed at least over a first exposed portion of the top surface of the contact region. When an electrically conductive interconnection couples to the contact region, the buffer layer absorbs a portion of a force exerted to form an interconnection between the electrically conductive interconnection and the contact region.

Method of manufacturing semiconductor device
09589926 · 2017-03-07 · ·

A method of manufacturing a semiconductor device that includes: preparing a pair of substrates that respectively include a device structure on one primary surface or another primary surface thereof; stacking the substrates so that said one primary surfaces face each other, exposing said another surfaces to the outside, and fixing entire peripheral outer edges of the substrates that have been stacked to each other; and thereafter, plating said exposed another primary surfaces of the stacked and fixed substrates.

Method of manufacturing semiconductor device
09589926 · 2017-03-07 · ·

A method of manufacturing a semiconductor device that includes: preparing a pair of substrates that respectively include a device structure on one primary surface or another primary surface thereof; stacking the substrates so that said one primary surfaces face each other, exposing said another surfaces to the outside, and fixing entire peripheral outer edges of the substrates that have been stacked to each other; and thereafter, plating said exposed another primary surfaces of the stacked and fixed substrates.