Patent classifications
H
H01
H01L
2224/00
H01L2224/01
H01L2224/26
H01L2224/28
H01L2224/29
H01L2224/2954
H01L2224/29599
H01L2224/29698
H01L2224/29798
H01L2224/29799
H01L2224/298
H01L2224/298
Adhesive sheet, method for manufacturing semiconductor device using same, method for manufacturing thermal airflow sensor using same, and thermal airflow sensor
09779976
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2017-10-03
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Provided is a thermal type airflow volume meter improving measurement accuracy, a method for manufacturing the same, and an adhesive sheet for use therein, the adhesive sheet divided into at least two or more per adherend and having a thickness of approximately 0.1 mm or less is divided to correspond to a shape of the adherend and generates or increases adhesion or stickiness by external energy.