A semiconductor package includes a plurality of stack modules which are vertically stacked. Each of the stack modules includes an interposing bridge, a semiconductor dies, and redistribution lines. The stack modules are provided by rotating each of the stack modules by different rotation angles corresponding to multiples of a reference angle and by vertically stacking the rotated stack modules. The interposing bridge includes a plurality of sets of through vias, and each set of through vias includes through vias arrayed in a plurality of columns. The plurality of sets of through vias are disposed in respective ones of divided regions of the interposing bridge. If the plurality of sets of through vias are rotated by the reference angle, then the rotated through vias overlap with the plurality of sets of through vias which are originally located. The redistribution lines connect the semiconductor dies to the plurality of sets of through vias.

A semiconductor package includes a plurality of stack modules which are vertically stacked. Each of the stack modules includes an interposing bridge, a semiconductor dies, and redistribution lines. The stack modules are provided by rotating each of the stack modules by different rotation angles corresponding to multiples of a reference angle and by vertically stacking the rotated stack modules. The interposing bridge includes a plurality of sets of through vias, and each set of through vias includes through vias arrayed in a plurality of columns. The plurality of sets of through vias are disposed in respective ones of divided regions of the interposing bridge. If the plurality of sets of through vias are rotated by the reference angle, then the rotated through vias overlap with the plurality of sets of through vias which are originally located. The redistribution lines connect the semiconductor dies to the plurality of sets of through vias.

A scanning alignment apparatus and scanning methods thereof are disclosed. The scanning alignment apparatus is used to scan a substrate and includes a transflective lens unit, an imaging element unit, an alignment lens unit and an illumination lens unit. The alignment lens unit includes a plurality of sub-alignment lens units, and the imaging element unit includes a plurality of imaging elements. Each of the sub-alignment lens units corresponds to a respective one of the imaging elements. The scanning alignment apparatus and scanning methods provided in the present invention can achieve higher scanning efficiency and thus enhanced productivity and product throughput.