An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.

An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.

A method for manufacturing a semiconductor package structure and a semiconductor manufacturing apparatus are provided. The method includes: (a) providing a package body disposed on a chuck, wherein the package body includes at least one semiconductor element encapsulated in an encapsulant; and (b) sucking the package body through the chuck to create a plurality of negative pressures on a bottom surface of the package body sequentially from an inner portion to an outer portion of the package body.

An image sensor package according to an embodiment of the present technology includes: a solid-state image sensor; a transparent substrate; and a package substrate. The solid-state image sensor has a light-receiving surface including a light-reception unit and a first terminal unit, and a rear surface opposite to the light-receiving surface. The transparent substrate faces the light-receiving surface. The package substrate includes a frame portion, a second terminal unit, and a supporting body. The frame portion has a joint surface to be joined to the transparent substrate and includes a housing portion housing the solid-state image sensor. The second terminal unit is to be wire-bonded to the first terminal unit, the second terminal unit being provided in the frame portion. The supporting body is provided in a peripheral portion of the light-receiving surface or at a center portion of the rear surface and partially supports the light-receiving surface or the rear surface.

An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.

An image sensor package according to an embodiment of the present technology includes: a solid-state image sensor; a transparent substrate; and a package substrate. The solid-state image sensor has a light-receiving surface including a light-reception unit and a first terminal unit, and a rear surface opposite to the light-receiving surface. The transparent substrate faces the light-receiving surface. The package substrate includes a frame portion, a second terminal unit, and a supporting body. The frame portion has a joint surface to be joined to the transparent substrate and includes a housing portion housing the solid-state image sensor. The second terminal unit is to be wire-bonded to the first terminal unit, the second terminal unit being provided in the frame portion. The supporting body is provided in a peripheral portion of the light-receiving surface or at a center portion of the rear surface and partially supports the light-receiving surface or the rear surface.

A method for manufacturing a semiconductor package structure and a semiconductor manufacturing apparatus are provided. The method includes: (a) providing a package body disposed on a chuck, wherein the package body includes at least one semiconductor element encapsulated in an encapsulant; and (b) sucking the package body through the chuck to create a plurality of negative pressures on a bottom surface of the package body sequentially from an inner portion to an outer portion of the package body.

An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.