H01L2224/7695

Chuck design and method for wafer

An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.

Chuck Design and Method for Wafer
20220359260 · 2022-11-10 ·

An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.

METHODS AND SYSTEM OF IMPROVING CONNECTIVITY OF INTEGRATED COMPONENTS EMBEDDED IN A HOST STRUCTURE
20210249316 · 2021-08-12 ·

The disclosure relates to systems, and methods for improving connectivity of embedded components. Specifically, the disclosure relates to systems and methods for using additive manufacturing to improve connectivity of embedded components with the host structure and/or other embedded components by selectably bridging the gap naturally formed due to manufacturing variation and built in tolerances, between the embedded components or devices and the host structure, and between one embedded component and a plurality of other embedded components.

Chuck Design and Method for Wafer
20210020492 · 2021-01-21 ·

An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.

Chuck design and method for wafer

An apparatus for securing a wafer includes a chuck, at least one O-ring disposed on the chuck, a vacuum system connected to the chuck, such that the vacuum system comprises a plurality of vacuum holes through the chuck connected to one or more vacuum pumps, and a controller configured to control the height of the at least one O-ring relative to the top surface of the chuck. The controller is connected to pressure sensors capable of detecting a vacuum. The at least one O-ring may include a plurality of O-rings.