H01L23/28
Encapsulations, e.g. encapsulating layers, coatings,; e.g. for protection
H01L23/28
Encapsulations, e.g. encapsulating layers, coatings,; e.g. for protection
H01L23/3121
a substrate forming part of the encapsulation
H01L23/3121
a substrate forming part of the encapsulation