H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L23/00 Details of semiconductor or other solid state devices
H01L23/52 Arrangements for conducting electric current within the device in operation from one component to another; , i.e. interconnections, e.g. wires, lead frames
H01L23/538 the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates