In one embodiment, a programming circuit is configured to form a programming current for a silicide fuse element by using a non-silicide programming element.

A preparation method for a flat cell ROM device, comprising the steps of: providing a substrate, and forming a P well on the substrate; forming a photomask layer on the P well and performing photoetching to form an injection window; injecting P-type ions in the formed injection window to form a P-type region; injecting N-type ions in the injection window so as to form an N-type region on the P-type region; and forming a gate oxide layer and a poly-silicon gate so as to complete the preparation of a device.

A method for integrating transistors and anti-fuses on a device includes epitaxially growing a semiconductor layer on a substrate and masking a transistor region of the semiconductor layer. An oxide is formed on an anti-fuse region of the semiconductor layer. A semiconductor material is grown over the semiconductor layer to form an epitaxial semiconductor layer in the transistor region and a defective semiconductor layer in the anti-fuse region. Transistor devices in the transistor region and anti-fuse devices in the anti-fuse region are formed wherein the defective semiconductor layer is programmable by an applied field.

An integrated circuit (IC) device includes a transistor and a metal fuse structure including a metal fuse electrically connected to the transistor, and a first metal line in parallel with the metal fuse and adjacent to a first portion of the metal fuse in a first direction. The first portion has a first width, and the metal fuse includes a second portion having a second width larger than the first width, and a first contour between the first and second portions and aligned with a first end of the first metal line.

A method for fabricating an one time programmable (OTP) device includes the steps of: forming a first gate structure and a second gate structure extending along a first direction on a substrate; forming a diffusion region adjacent to two sides of the first gate structure and the second gate structure; forming a silicide layer adjacent to the first gate structure; and patterning the first gate structure for forming a third gate structure and a fourth gate structure.

The present application discloses a semiconductor device with a programmable unit and a method for fabricating the semiconductor device. The semiconductor device includes a substrate comprising a first region and a second region; a first semiconductor element positioned in the first region of the substrate; a second semiconductor element positioned in the first region of the substrate and electrically coupled to the first semiconductor element; and a programmable unit positioned in the second region and electrically connected to the first semiconductor element.

A mask-programmable read only memory (ROM) is provided. The mask ROM includes first and second unit cells; an isolation gate electrode that isolates the first unit cell and the second unit cell; and a bit line that crosses the first and second unit cells. The first unit cell includes: a first source contact and a first bit line contact which are disposed on a semiconductor substrate; and a first gate electrode disposed between the first source contact and the first bit line contact. The second unit cell includes: a second source contact and a second bit line contact which are disposed on the semiconductor substrate; a second gate electrode disposed between the second source contact and the second bit line contact; and a via structure electrically connected to the second bit line contact. The bit line is connected to the via structure of the second unit cell.

Embodiments herein may describe techniques for an integrated circuit including a FinFET transistor to be used as an antifuse element having a path through a fin area to couple a source electrode and a drain electrode after a programming operation is performed. A FinFET transistor may include a source electrode in contact with a source area, a drain electrode in contact with a drain area, a fin area including silicon and between the source area and the drain area, and a gate electrode above the fin area and above the substrate. After a programming operation is performed to apply a programming voltage between the source electrode and the drain electrode to generate a current between the source electrode, the fin area, and the drain electrode, a path may be formed through the fin area to couple the source electrode and the drain electrode. Other embodiments may be described and/or claimed.

In some embodiments, the present disclosure relates to a one-time program memory device that includes a source-line arranged over a bottom dielectric layer. Further, a bit-line is arranged directly over the source-line in a first direction. A channel isolation structure is arranged between the source-line and the bit-line. A channel structure is also arranged between the source-line and the bit-line and is arranged beside the channel isolation structure in a second direction perpendicular to the first direction. A vertical gate electrode extends in the first direction from the bottom dielectric layer to the bit-line and is arranged beside the channel isolation structure in the second direction. The one-time program memory device further includes a gate dielectric layer arranged between the vertical gate electrode and the bit-line, the source-line, and the channel structure.

A one-time programmable (OTP) memory device includes an access transistor, a word line, a voltage line, a well, a first filling oxide layer, a first semiconductor layer, and a bit line. The access transistor includes a gate structure on a substrate, and first and second impurity regions at portions of the substrate adjacent to the gate structure. The word line is electrically connected to the gate structure. The voltage line is electrically connected to the first impurity region. The well is formed at an upper portion of the substrate, and is doped with impurities having a first conductivity type. The first filling oxide layer is formed on the well. The first semiconductor layer is formed on the first filling oxide layer, and is doped with impurities having the first conductivity type and electrically connected to the second impurity region. The bit line is electrically connected to the well.