H01L27/11592

SEMICONDUCTOR DEVICES
20220406797 · 2022-12-22 ·

A semiconductor device includes a plurality of first conductive lines extending in a first direction and spaced apart from each other in a second direction intersecting the first direction, the first direction and second direction being horizontal directions, a plurality of vertical semiconductor patterns disposed on the plurality of first conductive lines, respectively, a gate electrode crossing the plurality of first conductive lines and penetrating each of the plurality of vertical semiconductor patterns, a ferroelectric pattern between the gate electrode and each of the plurality of vertical semiconductor patterns, and a gate insulating pattern between the ferroelectric pattern and each of the plurality of vertical semiconductor patterns.

INTEGRATED CIRCUIT AND METHOD FOR MANUFACTURING THE SAME

A semiconductor device includes a semiconductor substrate, a memory gate, and a data storage element. The semiconductor substrate includes a memory well which has two source/drain regions and a channel region between the source/drain regions. The memory gate is disposed above the channel region. The data storage element includes a ferroelectric material, and is disposed around the memory gate to separate the memory gate from the channel region.

Integrated assemblies comprising ferroelectric transistors and non-ferroelectric transistors
11515331 · 2022-11-29 · ·

Some embodiments include an integrated assembly having a semiconductor structure extending from a first wiring to a second wiring. A ferroelectric transistor includes a first transistor gate adjacent a first region of the semiconductor structure. A first non-ferroelectric transistor includes a second transistor gate adjacent a second region of the semiconductor structure. The second region of the semiconductor structure is between the first region of the semiconductor structure and the first wiring. A second non-ferroelectric transistor includes a third transistor gate adjacent a third region of the semiconductor structure. The third region of the semiconductor structure is between the first region of the semiconductor structure and the second wiring.

Memory circuit and write method

A memory circuit includes a memory array including a plurality of memory cells, each memory cell including a gate structure including a ferroelectric layer and a channel layer adjacent to the gate structure, the channel layer including a metal oxide material. A driver circuit is configured to output a gate voltage to the gate structure of a memory cell, the gate voltage having a positive polarity and a first magnitude in in a first write operation and a negative polarity and a second magnitude in in a second write operation, and to control the second magnitude to be greater than the first magnitude.

THREE-DIMENSIONAL MEMORY
20220359569 · 2022-11-10 ·

Three-dimensional memories are provided. A three-dimensional memory includes a memory cell array, a first interconnect structure, a bit line decoder and a second interconnect structure. The bit line decoder is formed under the memory cell array and the first interconnect structure. The memory cell array includes a plurality of memory cells formed in a plurality of levels stacked in a first direction. The first interconnect structure includes at least one bit line extending in a second direction that is perpendicular to the first direction. The bit line includes a plurality of sub-bit lines stacked in the first direction. Each of the sub-bit lines is coupled to the memory cells that are arranged in a line in the corresponding level of the memory cell array. The second interconnect structure is configured to connect the bit line to the bit line decoder passing through the first interconnect structure.

EMBEDDED FERROELECTRIC MEMORY CELL
20220351769 · 2022-11-03 ·

The present disclosure relates to an integrated chip structure. The integrated chip structure includes a first source/drain region and a second source/drain region disposed within a substrate. A select gate is disposed over the substrate between the first source/drain region and the second source/drain region. A ferroelectric random-access memory (FeRAM) device is disposed over the substrate between the select gate and the first source/drain region. A first sidewall spacer, including one or more dielectric materials, is arranged laterally between the select gate and the FeRAM device. An inter-level dielectric (ILD) structure laterally surrounds the FeRAM device and the select gate and vertically overlies a top surface of the first sidewall spacer.

Memory device

A memory device includes a substrate including first and second regions, the first region having first wordlines and first bitlines, and the second region having second wordlines and second bitlines, a first memory cell array including first memory cells in the first region, the first memory cell array having volatility, and each of the first memory cells including a cell switch having a first channel region adjacent to a corresponding first wordline of the first wordlines, and a capacitor connected to the cell switch, and a second memory cell array including second memory cells in the second region, the second memory cell array having non-volatility, and each of the second memory cells including a second channel region adjacent to a corresponding second wordline of the second wordlines, and a ferroelectric layer between the corresponding second wordline of the second wordlines and the second channel region.

SEMICONDUCTOR DEVICE INCLUDING MEMORY CELLS AND METHOD FOR MANUFACTURING THEREOF

A semiconductor device includes logic circuitry including a transistor disposed over a substrate, multiple layers each including metal wiring layers and an interlayer dielectric layer, respectively, disposed over the logic circuitry, and memory arrays. The multiple layers of metal wiring include, in order closer to the substrate, first, second, third and fourth layers, and the memory arrays include lower multiple layers disposed in the third layer.

3D FERROELECTRIC MEMORY
20220336498 · 2022-10-20 ·

Various embodiments of the present disclosure are directed towards a metal-ferroelectric-insulator-semiconductor (MFIS) memory device, as well as a method for forming the MFIS memory device. According to some embodiments of the MFIS memory device, a lower source/drain region and an upper source/drain region are vertically stacked. A semiconductor channel overlies the lower source/drain region and underlies the upper source/drain region. The semiconductor channel extends from the lower source/drain region to the upper source/drain region. A control gate electrode extends along a sidewall of the semiconductor channel and further along individual sidewalls of the lower and upper source/drain regions. A gate dielectric layer and a ferroelectric layer separate the control gate electrode from the semiconductor channel and the lower and upper source/drain regions.

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF

A semiconductor die comprises a device portion comprising: an array of active memory devices extending in a first direction, and interface portions located adjacent to axial ends of the device portion in the first direction. The interface portions have a staircase profile in a vertical direction and comprise an array of dummy memory devices and an array of gate vias. The dummy memory devices are axially aligned with the active memory devices in the first direction, each dummy memory device comprising at least one interface via. Moreover, each row of the array of gate vias extends in the first direction and is located parallel to a row of the array of dummy memory devices in a second direction perpendicular to the first direction. Each gate via is electrically coupled to the at least one interface via of a dummy memory device located adjacent thereto.