H01L29/158

Method of Manufacturing a Super Junction Semiconductor Device and Super Junction Semiconductor Device
20180006147 · 2018-01-04 ·

A semiconductor device is manufactured by: i) forming a mask on a process surface of a semiconductor layer, elongated openings of the mask exposing part of the semiconductor layer and extending along a first lateral direction; ii) implanting dopants of a first conductivity type into the semiconductor layer based on tilt angle α1 between an ion beam direction and a process surface normal and based on twist angle ω1 between the first lateral direction and a projection of the ion beam direction on the process surface; iii) implanting dopants of a second conductivity type into the semiconductor layer based on tilt angle α2 between an ion beam direction and the process surface normal and based on twist angle ω2 between the first lateral direction and a projection of the ion beam direction on the process surface; and repeating i) to iii) at least one time.

HETEROJUNCTION BIPOLAR TRANSISTOR

A heterojunction bipolar transistor includes a collector layer, a base layer, an emitter layer, and a semiconductor layer that are laminated in this order, wherein the emitter layer includes a first region having an upper surface on which the semiconductor layer is laminated, and a second region being adjacent to the first region and having an upper surface that is exposed, and the first and second regions of the emitter layer have higher doping concentrations in portions near the upper surfaces than in portions near an interface between the emitter layer and the base layer.

Method for forming super-junction corner and termination structure with graded sidewalls

A method for forming a superjunction power semiconductor device includes forming multiple epitaxial layers of a first conductivity type on a semiconductor substrate and implanting dopants of a second conductivity type into each epitaxial layer to form a first group of implanted regions in a first region and a second group of implanted regions in a second region in each epitaxial layer. The multiple epitaxial layers are annealed to form multiple columns of the second conductivity type having slanted sidewalls across the first to last epitaxial layers. The columns include a first group of columns formed by the implanted regions of the first group and having a first grading and a second group of columns formed by the implanted regions of the second group and having a second grading, where the second grading is less than the first grading.

Superlattice structure including two-dimensional material and device including the superlattice structure

Provided are a superlattice structure including a two-dimensional material and a device including the superlattice structure. The superlattice structure may include at least two different two-dimensional (2D) materials bonded to each other in a lateral direction, and an interfacial region of the at least two 2D materials may be strained. The superlattice structure may have a bandgap adjusted by the interfacial region that is strained. The at least two 2D materials may include first and second 2D materials. The first 2D material may have a first bandgap in an intrinsic state thereof. The second 2D material may have a second bandgap in an intrinsic state thereof. An interfacial region of the first and second 2D materials and an adjacent region may have a third bandgap between the first bandgap and the second bandgap.

LATERAL BIPOLAR TRANSISTOR STRUCTURE WITH SUPERLATTICE LAYER AND METHOD TO FORM SAME

Embodiments of the disclosure provide a lateral bipolar transistor structure with a superlattice layer and methods to form the same. The bipolar transistor structure may have a semiconductor layer of a first single crystal semiconductor material over an insulator layer. The semiconductor layer includes an intrinsic base region having a first doping type. An emitter/collector (E/C) region may be adjacent the intrinsic base region and may have a second doping type opposite the first doping type. A superlattice layer is on the E/C region of the semiconductor layer. A raised E/C terminal, including a single crystal semiconductor material, is on the superlattice layer. The superlattice layer separates the E/C region from the raised E/C terminal.

SEMICONDUCTOR ELEMENT, METHOD OF READING OUT A QUANTUM DOT DEVICE AND SYSTEM
20220320291 · 2022-10-06 ·

Semiconductor element, method of reading out a quantum dot device and system. The present document relates to a semiconductor element for providing a source reservoir for a charge sensor of a quantum dot device. The element comprises a semiconductor heterostructure (2, 3, 5) including a quantum well layer (5) contiguous to a semiconductor functional layer (3), one or more ohmic contacts (9) for providing charge carriers, and a first accumulation gate electrode (13) located opposite the quantum well layer and spaced apart therefrom at least by the semiconductor functional layer for enabling to form a two dimensional charge carrier gas (14) in a first area of the quantum well layer upon applying a first biasing voltage to the first accumulation gate electrode. The device further comprises a second accumulation gate electrode (17) opposite the quantum well layer and electrically isolated from the first accumulation gate electrode (13), the second accumulation gate electrode enabling to be biased with a second biasing voltage, for enabling to extend the two dimensional charge carrier gas in a second area (18) contiguous to the first area. This document further relates to a method of determining a spin state in a quantum dot device, as well as a system comprising a quantum dot device and a semiconductor element.

NANORIBBON-BASED QUANTUM DOT DEVICES

Quantum dot devices and related methods and systems that use semiconductor nanoribbons arranged in a grid where a plurality of first nanoribbons, substantially parallel to one another, intersect a plurality of second nanoribbons, also substantially parallel to one another but at an angle with respect to the first nanoribbons, are disclosed. Different gates at least partially wrap around individual portions of the first and second nanoribbons, and at least some of the gates are provided at intersections of the first and second nanoribbons. Unlike previous approaches to quantum dot formation and manipulation, nanoribbon-based quantum dot devices provide strong spatial localization of the quantum dots, good scalability in the number of quantum dots included in the device, and/or design flexibility in making electrical connections to the quantum dot devices to integrate the quantum dot devices in larger computing devices.

Quantum well stacks for quantum dot devices

Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include a (111) silicon substrate, a (111) germanium quantum well layer above the substrate, and a plurality of gates above the quantum well layer. In some embodiments, a quantum dot device may include a silicon substrate, an insulating material above the silicon substrate, a quantum well layer above the insulating material, and a plurality of gates above the quantum well layer.

Quantum dot channel (QDC) quantum dot gate transistors, memories and other devices
09735236 · 2017-08-15 ·

This invention describes a field-effect transistor in which the channel is formed in an array of quantum dots. In one embodiment the quantum dots are cladded with a thin layer serving as an energy barrier. The quantum dot channel (QDC) may consist of one or more layers of cladded dots. These dots are realized on a single or polycrystalline substrate. When QDC FETs are realized on polycrystalline or nanocrystalline thin films they may yield higher mobility than in conventional nano- or microcrystalline thin films. These FETs can be used as thin film transistors (TFTs) in a variety of applications. In another embodiment QDC-FETs are combined with: (a) coupled quantum well SWS channels, (b) quantum dot gate 3-state like FETs, and (c) quantum dot gate nonvolatile memories.

Stretchable form of single crystal silicon for high performance electronics on rubber substrates

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.