H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L29/00 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; ; Multistep manufacturing processes therefor;
H01L29/66 Types of semiconductor device; ; Multistep manufacturing processes therefor
H01L29/66007 Multistep manufacturing processes
H01L29/66053 of devices having a semiconductor body comprising crystalline silicon carbide
H01L29/66068 the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices