An apparatus includes a first drain/source region and a second drain/source region surrounded by an isolation ring formed over a substrate, the isolation ring formed being configured to be floating, and a first diode connected between the substrate and the isolation ring, wherein the first diode is a Schottky diode.

The present disclosure provides a nitride semiconductor device. The nitride semiconductor device includes: an electron transport layer, made of a nitride semiconductor; an electron supply layer, disposed on the electron transport layer and made of a nitride semiconductor having a band gap greater than a band gap of the nitride semiconductor of the electron transport layer; a first protective layer, disposed on the electron supply layer and made of a nitride semiconductor having a band gap less than the band gap of the nitride semiconductor of the electron supply layer; a second protective layer, disposed on a portion of the first protective layer and made of a nitride semiconductor having a band gap greater than the band gap of the nitride semiconductor of the first protective layer; and a gate layer, disposed on the second protective layer.

A semiconductor device according to the present invention includes a first conductive-type SiC semiconductor layer, and a Schottky metal, comprising molybdenum and having a thickness of 10 nm to 150 nm, that contacts the surface of the SiC semiconductor layer. The junction of the SiC semiconductor layer to the Schottky metal has a planar structure, or a structure with recesses and protrusions of equal to or less than 5 nm. A method for manufacturing a semiconductor device according to the present invention includes: a step of forming a Schottky metal, comprising molybdenum and having a thickness of 10 nm to 150 nm, on the surface of a first conductive-type SiC semiconductor layer; and a step for heat treating the Schottky metal whilst the surface thereof is exposed, and structuring the junction of the SiC semiconductor layer to the Schottky metal to be planar, or to have recesses and protrusions of equal to or less than 5 nm.

A Schottky metal is in Schottky-contact with a center portion of a surface of an epitaxial layer. A peripheral trench is formed by digging from the surface of the epitaxial layer on a boundary portion between an active region where the Schottky metal is in Schottky-contact with the surface of the epitaxial layer and a peripheral region outside of the active region in a surface layer portion of the epitaxial layer. An insulating film is formed on an entire area of inner wall surfaces of the peripheral trench. There is provided with a conductor which is connected to the Schottky metal and is opposed to the entire area of the inner wall surfaces of the peripheral trench via the insulating film in the peripheral trench.

A semiconductor has a layer of a first conductivity type with a main surface, a trench separation structure which includes a separation trench formed in the main surface, a separation insulating film that covers a wall surface of the separation trench and a separation electrode that is embedded in the separation trench across the separation insulating film, the trench separation structure demarcating an outer region and an active region in the main surface, a floating region of a second conductivity type which is formed in an electrically floating state at a surface layer portion of the main surface along the trench separation structure in the outer region, and a Schottky electrode which is electrically connected to the separation electrode such as to retain the floating region in the electrically floating state in the outer region and which forms a Schottky junction with the main surface in the active region.

Exemplary methods of forming a semiconductor structure may include forming a doped silicon layer on a semiconductor substrate. A level of doping may be increased at an increasing distance from the semiconductor substrate. The methods may include etching the doped silicon layer to define a trench extending to the semiconductor substrate. The doped silicon layer may define a sloping sidewall of the trench. The trench may be characterized by a depth of greater than or about 30 μm. The methods may include lining the trench with a first oxide material. The methods may include depositing a second oxide material within the trench. The methods may include forming a contact to produce a power device.

A low turn-on voltage GaN diode having an anode metal with a consistent crystal orientation and a preparation method thereof. The low turn-on voltage GaN diode having an anode metal with a consistent crystal orientation provided by the present disclosure includes a substrate layer, a GaN buffer layer, a GaN channel layer and an AlGaN barrier layer, which are arranged in sequence from bottom to top; a cathode arranged on the AlGaN barrier layer; a groove arranged in the GaN channel layer and the AlGaN barrier layer, and an anode provided on a bottom and a side wall of the groove and part of the AlGaN barrier layer; a dielectric layer provided on an uncovered portion of the AlGaN barrier layer; wherein, a contact portion of the anode with the groove and the AlGaN barrier layer is W or Mo metal with a crystal orientation of <100>.

The present disclosure is directed to a diode with a semiconductor body of silicon including a cathode region, which has a first conductivity type and is delimited by a front surface; and an anode region, which has a second conductivity type and extends into the cathode region from the front surface. The diode further includes a barrier region of cobalt disilicide, arranged on the anode region; and a metallization region of aluminum or of an aluminum alloy, arranged on the barrier region. The barrier region contacts the anode region.

A semiconductor device according to the present disclosure includes: a gate electrode provided in a gate trench and provided so as to oppose a source region via a gate insulating film; a first bottom protection region of a second conductivity type provided below the gate insulating film; a plurality of first connection regions of the second conductivity type provided at a first interval in an extension direction of the gate trench and electrically connecting the first bottom protection region and a body region; a Schottky electrode provided in a Schottky trench; a second bottom protection region of the second conductivity type provided below the Schottky electrode; and a plurality of second connection regions of the second conductivity type provided at a second interval smaller than the first interval in an extension direction of the Schottky trench and electrically connecting the second bottom protection region and the body region.

Disclosed is a trench-type power device and a manufacturing method thereof. The trench-type power device comprises: a semiconductor substrate; a drift region located on the semiconductor substrate; a first trench and a second trench located in the drift region; a gate stack located in the first trench; and Schottky metal located on a side wall of the second trench, wherein the Schottky metal and the drift region form a Schottky barrier diode. The trench-type power device adopts a double-trench structure, which combines a trench-type MOSFET with the Schottky barrier diode and forms the Schottky metal on the side wall of the trench, so that the performance of the power device can be improved, and the unit area of the power device can be reduced.