H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L29/00 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; ; Multistep manufacturing processes therefor;
H01L29/66 Types of semiconductor device; ; Multistep manufacturing processes therefor
H01L29/68 controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
H01L29/70 Bipolar devices
H01L29/72 Transistor-type devices, i.e. able to continuously respond to applied control signals
H01L29/739 controlled by field-effect,; e.g. bipolar static induction transistors [BSIT]
H01L29/7393 Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
H01L29/7395 Vertical transistors, e.g. vertical IGBT
H01L29/7396 with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
H01L29/7397 and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT