H01L2924/2024

LASER ENHANCED WIRE BONDING FOR SEMICONDUCTOR DEVICE PACKAGES
20250140739 · 2025-05-01 ·

An example apparatus includes: a wire bond tool including a bond wire capillary having a central opening configured for receiving a bond wire in the central opening; a first laser path formed in the capillary configured to focus a first laser beam on the end of the bond wire to form a free air ball; and a second laser path formed in the capillary configured to focus a second laser beam on a bonding location beneath the capillary.