A monolithically integrated, tunable infrared pixel comprises a combined broadband detector and graphene-enabled tunable metasurface filter that operate as a single solid-state device with no moving parts. Functionally, tunability results from the plasmonic properties of graphene that are acutely dependent upon the carrier concentration within the infrared. Voltage induced changes in graphene's carrier concentration can be leveraged to change the metasurface filter's transmission thereby altering the “colors” of light reaching the broadband detector and hence its spectral responsivity. The invention enables spectrally agile infrared detection with independent pixel-to-pixel spectral tunability.

A Method for producing a microsystem (1) with pixels includes: producing a thermal silicon oxide layer on the surface of a silicon wafer as a base layer (5) by oxidation of the silicon wafer; producing a silicon oxide thin layer on the base layer as a carrier layer (6)by thermal deposition; producing a platinum layer on the carrier layer by thermal deposition, whereby an intermediate product is produced; cooling the intermediate product to room temperature; pixel-like structuring of the platinum layer by removing surplus areas of the platinum layer, whereby bottom electrodes (8, 12) of the pixels (7, 8) are formed in pixel shape on the carrier layer in remaining areas; removing material on the side of the silicon wafer facing away from the base layer, so a frame (3) remains and a membrane (4) formed by the base layer and the carrier layer is spanned by the frame.

An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.

Pyroelectric detection device, including at least: a substrate; a membrane arranged on the substrate; a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes; a cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate; an element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane.

A residual stress in a PZT type ferroelectric film 12 formed on a substrate body 11 by a sol-gel process is −14 MPa to −31 MPa, and the ferroelectric film 12 is crystal oriented in a (100) plane.

An energy generator including a material having a Curie temperature is provided. The energy generator includes a hot source at a first temperature, a cold sink at a second temperature, a means to couple the hot source to the material while the cold sink is insulated from the material, and a means to couple the cold sink to the material while the hot source is insulated from the material, wherein: the first temperature higher than the Curie temperature, and the second temperature lower than the Curie temperature. Also provided is an energy generator including elements as above, between the hot source and the cold sink. Further provided is a genset having an engine for producing electrical energy, a coolant system, an exhaust element, and an alternator, and an energy generator as above. A method for use an energy generator as above is also provided.

A method for converting heat to electric energy is described which involves thermally cycling an electrically polarizable material sandwiched between electrodes. The material is heated by extracting thermal energy from a gas to condense the gas into a liquid and transferring the thermal energy to the electrically polarizable material. An apparatus is also described which includes an electrically polarizable material sandwiched between electrodes and a heat exchanger for heating the material in thermal communication with a heat source, wherein the heat source is a condenser. An apparatus is also described which comprises a chamber, one or more conduits inside the chamber for conveying a cooling fluid and an electrically polarizable material sandwiched between electrodes on an outer surface of the conduit. A gas introduced into the chamber condenses on the conduits and thermal energy is thereby transferred from the gas to the electrically polarizable material.

A micromechanical sensor device and a corresponding production method include a substrate that has a front and a rear and a plurality of pillars that are formed on the front of the substrate. On each pillar, a respective sensor element is formed, which has a greater lateral extent than the associated pillar. A cavity is provided laterally to the pillars beneath the sensor elements. The sensor elements are laterally spaced apart from each other by respective separating troughs and make electrical contact with a respective associated rear contact via the respective associated pillar.

Disclosed herein is a non-Inductive voltage boost-converter (NVBC) for micro-power energy harvesting systems for energy storage and delivery applications. Current devices deliver a wide-range of micro-power having only up to 0.8V peak-voltage, but nominally 0.45V in lab test conditions. This voltage is not adequate in charging storage cells such as rechargeable batteries and also driving electronic circuits. Technology is in demand where a boost-converter must operate at MOS sub-threshold voltage (Sub-V.sub.TH) limits. Disclosed herein is a novel NVBC device that has eliminated the need of an inductor coil and associated high-speed switching circuits; thus achieving higher efficiency. The disclosed invention applies a simple self-synchronizing technique to adapt the NVBC automatically to the low-frequency energy signal of a pyroelectric device. A novel NVBC is presented for stabilized output of NVBC (S-NVBC). In an embodiment, the S-NVBC achieves an efficiency of 86%.

A heat transfer system is disclosed in which, an electrocaloric material includes a copolymer of a monomer mixture including (i) vinylidene fluoride, (ii) an addition polymerization monomer selected from tetrafluoroethylene, trifluoroethylene, or a monomer smaller than trifluoroethylene, and (iii) a halogenated addition polymerization monomer different than (ii) that is larger than vinylidene fluoride. The electrocaloric material also includes an additive selected from a nucleating agent having a polar surface charge, electrocalorically active solid particles, or a combination thereof. Electrodes are disposed on opposite surfaces of the electrocaloric material, and an electric power source is configured to provide voltage to the electrodes. The system also includes a first thermal flow path between the electrocaloric material and a heat sink, and a second thermal flow path between the electrocaloric material and a heat source.