A metal stack for templating the growth of AlN and ScAlN films is disclosed. The metal stack comprises one, two, or three layers of metal, each of which is compatible with CMOS post-processing. The metal stack provides a template that promotes the growth of highly textured c-axis {002} AlN and ScAlN films. The metal stacks include one or more metal layers with each metal layer having either a hexagonal {002} orientation or a cubic {111} orientation. If the metal stack includes two or more metal layers, the layers can alternate between hexagonal {002} and cubic {111} orientations. The use of ScAlN results in a higher piezoelectric constant compared to that of AlN for ScAlN alloys up to approximately 44% Sc. The disclosed metal stacks resulted in ScAlN films having XRD FWHM values of less than approximately 1.1° while significantly reducing the formation of secondary grains in the ScAlN films.

A plurality of conductive via connections are fabricated on a substrate located at positions where MTJ devices are to be fabricated, wherein a width of each of the conductive via connections is smaller than or equivalent to a width of the MTJ devices. The conductive via connections are surrounded with a dielectric layer having a height sufficient to ensure that at the end of a main MTJ etch, an etch front remains in the dielectric layer surrounding the conductive via connections. Thereafter, a MTJ film stack is deposited on the plurality of conductive via connections surrounded by the dielectric layer. The MTJ film stack is etched using an ion beam etch process (IBE), etching through the MTJ film stack and into the dielectric layer surrounding the conductive via connections to form the MTJ devices wherein by etching into the dielectric layer, re-deposition on sidewalls of the MTJ devices is insulating.

Exemplary practice of the present invention provides a magnetostrictive actuator characterized by linear force output and uniform magnetic biasing. A center bias magnet drives flux through series magnetostrictive bars in opposite directions while surrounding drive coils apply flux in the same direction through the bars. The net response is substantially linear with respect to the drive coil current. A second parallel set of magnetostrictive bars completes the flux path and adds to the actuator output force. Flux leakage between the parallel bars is compensated by a ferromagnetic shunt or by a tapered magnet providing uniform flux density down the length of the magnetostrictive bars. The closed flux path allows magnetic shielding of the entire actuator, if desired.

An actuator device having an expansion unit (10), which comprises a magnetically active shape memory alloy material (12) and which carries out an expansion movement from a starting position along an expansion direction as a reaction to an energization of a coil device (30) and interacts with restoring means which exert on the expansion unit (10) a restoring force opposite to the expansion direction, wherein the restoring force has permanent magnets which act or are seated on a section of the expansion unit (10) such that the restoring force generated magnetically by the permanent magnets changes with increasing expansion stroke in the expansion direction, wherein the permanent magnets (16, 34, 40, 52, 54) are embodied and/or designed such that the expansion unit (10) can contract into the starting position along the expansion stroke when the coil device (30) is not energized.

To reduce the construction effort and also to make it smaller, the detector coil (6) is formed in the detector head (7) of a magnetostrictive position sensor (100) in a semiconductor chip (2), in which at the same time also the evaluation circuit (16) is formed and—if biased electrically and by means of direct current—also the then necessary separate bias coil (18).

The present disclosure relates to systems and methods for electrodynamic wireless power receivers. In some examples, a wireless power receiver electromechanically converts energy from a magnetic field. The wireless power receiver includes a planar suspension structure and at least one magnet. The planar suspension structure is tuned to cause oscillation of the at least one magnet at a resonance frequency based on a frequency of the time-varying magnetic field to generate electrical energy in the wireless power receiver.

The disclosure describes new apparatus, systems and methods utilizing magnetoelectric neural stimulators with tunable amplitude and waveform. Specific embodiments of the present disclosure include a magnetoelectric film, a magnetic field generator and an electrical circuit coupled to the magnetoelectric film, in particular embodiments, the electrical circuit comprises components configured modify an electrical output signal produced by the magnetoelectric film. In certain embodiments, the electrical circuit is configured to modify the electric signal to charge a charge storage element, to transmit data to an implantable wireless neural stimulator, and to provide a stimulation output to electrodes.

A magneto-electric converter capable of converting a variation in magnetic field into a potential difference between two electrical terminals includes a support layer comprising two electrical terminals; a stack disposed on the support layer of a first layer made from a magnetostrictive material defining the reference plane and of a second layer made from a piezoelectric material having a polarization axis in the plane defined by the second layer, parallel to the reference plane; the second layer comprising electrodes; and a means for electrical connection of the electrodes to the electrical terminals.

The invention relates generally to electroactive material actuators (and combined sensor-actuators) having embedded magnetic particles (42) for facilitating enhanced actuation and/or sensing effects.

Exemplary practice of the present invention provides a magnetostrictive actuator characterized by linear force output and uniform magnetic biasing. A center bias magnet combined with a flux transfer tube produces a uniform magnetic bias down the length of a magnetostrictive component. Depending on the inventive embodiment, the magnetostrictive component may include one magnetostrictive element or a pair of collinear magnetostrictive elements. A center bias magnet, in combination with a flux transfer tube, drives magnetic flux through the magnetostrictive component (e.g., a series of magnetostrictive rods) in opposite directions, while surrounding drive coils apply flux in the same direction through the magnetostrictive component. The net response is substantially linear with respect to the drive coil current. The flux transfer tube applies distributed magnetic flux to the magnetostrictive component at a rate that ensures uniform magnetic flux density down the length of the magnetostrictive component.