Patent classifications
H01L41/083
Fully-wet via patterning method in piezoelectric sensor
Various embodiments of the present disclosure are directed towards a method for forming a piezoelectric device including a piezoelectric membrane and a plurality of conductive layers. The method includes forming the plurality of conductive layers in the piezoelectric membrane, the plurality of conductive layers are vertically offset one another. A masking layer is formed over the piezoelectric membrane. An etch process is performed according to the masking layer to concurrently expose an upper surface of each conductive layer in the plurality of conductive layers. A plurality of conductive vias are formed over the upper surface of the plurality of conductive layers.
CERAMIC MATERIAL, METHOD FOR PRODUCING THE CERAMIC MATERIAL, AND ELECTROCERAMIC COMPONENT COMPRISING THE CERAMIC MATERIAL
The invention relates to a ceramic material, comprising lead zirconate titanate, which additionally contains K and optionally Cu. The ceramic material can be used in an electroceramic component, for example a piezoelectric actuator. The invention also relates to methods for producing the ceramic material and the electronic component.
METHOD FOR PRODUCING PIEZOELECTRIC MULTI-LAYERED COMPONENTS
The present invention relates to a method for producing piezoelectric multi-layered components (2), which comprises the following steps: applying an electrode material (5) to green sheets (3) containing a piezoelectric material, applying a layer of a first auxiliary material (9) to at least one green sheet (3) containing the piezoelectric material, forming a stack (1), in which the green sheets (3), to which electrode material (5) is applied, are arranged one on top of another, wherein at least one ply of the green sheet (3), to which the layer of the first auxiliary material (9) is applied, is arranged in the stack (1), sintering the stack (1), wherein the layer of the first auxiliary material (9) is thinned, and firing the stack (1), wherein the stack (1) is singulated along the at least one ply into at least two multi-layered components (2).
LAMINATED PIEZOELECTRIC ELEMENT, AND INJECTION DEVICE AND FUEL INJECTION SYSTEM PROVIDED WITH SAME
There are provided a laminated piezoelectric element in which a stress applied to an interface between a cover layer and a stacked body is reduced, and an injection device and a fuel injection system provided with the laminated piezoelectric element. A laminated piezoelectric element includes a stacked body in which piezoelectric layers and internal electrode layers are alternately laminated; and a cover layer disposed so as to surround a side face of the stacked body, and the cover layer has a two-layer structure with an annular boundary when viewed in a section perpendicular to a stacking direction of the stacked body.
Heat Supply For Thermal Battery and Thermal Battery Having the Heat Supply
A thermal battery including: a casing; a battery cell disposed in the casing; a heat generating pyrotechnic material, separate from the battery cell, at least partially surrounding the battery cell; and insulation disposed between the heat generating pyrotechnic material and the casing, wherein the heat generating pyrotechnic material is disposed in a flattened tube having a flat cross-section where at least two sides are substantially parallel, the flattened tube being spirally wound to form a shape corresponding to a complimentary shape of at least a portion of the battery cell.
PIEZOELECTRIC ELEMENT
A piezoelectric element includes a piezoelectric body containing a piezoelectric ceramic material, and a first electrode and a second electrode disposed on the piezoelectric body to oppose each other. A stress received by the piezoelectric body from the first electrode is larger than a stress received by the piezoelectric body from the second electrode. A polarization direction of the piezoelectric body is a direction directed from the first electrode toward the second electrode.
Electroactive polymer actuator device and driving method
An actuator device has an electroactive polymer actuator (35) and an integrated piezoelectric transformer (30) whose primary side (32) and secondary side (34) are formed from different electroactive polymer materials. At least the secondary side (34) of the transformer shares a piezoelectric electroactive polymer layer (36) with the electroactive polymer actuator, so that lower external voltages can be applied to the device.
Liquid discharge head
There is provided a liquid discharge head including a piezoelectric body having a plurality of individual electrodes and a first common electrode, and a plurality of conductor layers. The plurality of individual electrodes have first to fourth individual electrode arrays, and the first common electrode has first and second extending portions, a plurality of first projecting portions, and a plurality of second projecting portions. Each of the first projecting portions overlaps partially with one of the plurality of individual electrodes forming the second individual electrode array along the stacking direction, and each of the second projecting portions overlaps partially with one of the plurality of individual electrodes forming the third individual electrode array along the stacking direction. The plurality of conductor layers are formed between the plurality of first projecting portions and the plurality of second projecting portions, without contacting the first common electrode and without contacting each other.
Ultrasonic transducer
An ultrasonic transducer includes a carrier with a first surface and a second surface which are opposite to each other, a piezoceramic element attached on the first surface of the carrier, a first acoustic matching layer with a third surface and a fourth surface which are opposite to each other, the third surface is attached on the second surface of the carrier, wherein the first acoustic matching layer includes a mesh with openings, and the thickness of first acoustic matching layer is smaller than ¼ wavelength of an ultrasonic wave emitted by the piezoceramic element in the first acoustic matching layer in an operating frequency, and a total area of the openings of mesh is larger than 30% area of the third surface of first acoustic matching layer, and a second acoustic matching layer disposed on the fourth surface of the first acoustic matching layer.
Micro-electromechanical system pump
A MEMS pump includes a first substrate, a first oxide layer, a second substrate, a second oxide layer, a third substrate and a piezoelectric element sequentially stacked to form the entire structure of the MEMS pump. The first substrate has a first thickness and at least one inlet aperture. The first oxide layer has at least one fluid inlet channel and a convergence chamber, wherein the fluid inlet channel communicates with the convergence chamber and the inlet aperture. The second substrate has a second thickness and a through hole, and the through hole is misaligned with the inlet aperture and communicates with the convergence chamber. The second oxide layer has a first chamber with a concave central portion. The third substrate has a third thickness and a plurality of gas flow channels, wherein the gas flow channels are misaligned with the through hole.