Provided is an apparatus for treating a substrate including: a processing vessel having a processing space; a support unit for supporting the substrate in the processing space and rotating the substrate; a liquid supply unit for supplying a processing liquid to the substrate; and a heating unit for heating the substrate, wherein the support unit includes: a spin chuck; a rotation driver for rotating the spin chuck; a chuck pin installed on the spin chuck to be rotated with the spin chuck; a chuck pin moving unit for moving the chuck pin between a contact position wherein the chuck pin is in contact with a side portion of the substrate and an open position at which the chuck pin is spaced apart from the side portion of the substrate, and the chuck pin moving unit moves the chuck pin while the substrate is rotated by the spin chuck.

In order to effect a seal a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non-contact seal that is more stable and reliable than hydrodynamic seals currently in use. A non-contact bearing is also disclosed having opposing surfaces with relative motion and one surface issuing higher than ambient pressure through a porous restriction, wherein the porous restriction is part of a monolithic porous body, or a porous layer, attached to lands containing a labyrinth, the porous restriction and lands configured to not distort more than 10% of a gap created from differential pressure between each side of the porous restriction.

A power supply connector has a first part and a second part that are connected to each other such that they can turn relative each other within a predefined and/or restricted turning angle. The first part includes a first set of plurality of conductors and the second part includes a corresponding second set of plurality of conductors, wherein the pairs of conductors are electrically connected by electrical connections including a connection tip on one of the first and the second part and a contact surface on the other one, wherein the electrical connections are provided in at least one circular shape around a turn axis of the power supply connector The turning angle between the first part and the second part is limited to the shortest angular extension of the contact surfaces and the contact surfaces are distributed such that the pair of conductors are permanently electrically connected.

A bearing isolator and explosion-proof current diverting device may be configured to dissipate an electrical charge from a rotating piece of equipment to ground, such as from a motor shaft to a motor housing. One aspect of an explosion-proof current diverter ring may include a stator that may be mounted to the equipment housing and a rotor that may be mounted to a shaft. The rotor may rotate with the shaft. A conductive assembly may be positioned in a radial bore formed in the stator such that the conductive assembly contacts the rotor to conduct electricity from the shaft to the housing through the explosion-proof current diverting device. The explosion-proof current diverting device may be configured to define a flame path to achieve various explosion-proof certifications.

A bearing isolator and explosion-proof current diverting device may be configured to dissipate an electrical charge from a rotating piece of equipment to ground, such as from a motor shaft to a motor housing. One aspect of an explosion-proof current diverter ring may include a stator that may be mounted to the equipment housing and a rotor that may be mounted to a shaft. The rotor may rotate with the shaft. A conductive assembly may be positioned in a radial bore formed in the stator such that the conductive assembly contacts the rotor to conduct electricity from the shaft to the housing through the explosion-proof current diverting device. The explosion-proof current diverting device may be configured to define a flame path to achieve various explosion-proof certifications.

A contact ring for an electroprocessor has redundant contact fingers, i.e., more contact fingers than needed for contacting a very narrow edge exclusion zone on a substrate such as a semiconductor wafer. The contact fingers have slightly different lengths so that they extend to different radial positions. By providing redundant contact fingers, and by slightly varying the lengths of the contact fingers, a sufficient number of contact fingers make contact with the electrically conductive surface in the edge exclusion zone to provide good electroplating results.

A power supply connector has a first part and a second part that are connected to each other such that they can turn relative each other within a predefined and/or restricted turning angle. The first part includes a first set of plurality of conductors and the second part includes a corresponding second set of plurality of conductors, wherein the pairs of conductors are electrically connected by electrical connections including a connection tip on one of the first and the second part and a contact surface on the other one, wherein the electrical connections are provided in at least one circular shape around a turn axis of the power supply connector The turning angle between the first part and the second part is limited to the shortest angular extension of the contact surfaces and the contact surfaces are distributed such that the pair of conductors are permanently electrically connected.

A computer-implemented method and system for transmitting power and data together in a rotorcraft using a slip ring assembly is disclosed. According to one example, a computer-implemented method includes providing a slip ring assembly comprising a stationary element coupled to an airframe of a rotorcraft and a rotatable element rotatable relative to the stationary element and coupled to a rotor assembly of the rotorcraft. Power is transmitted from a power source associated with the airframe to an electronic device associated with the rotor assembly, the slip ring assembly being configured to complete an electrical circuit between the power source and the electronic device to provide power from the power source to the electronic device. Data is transmitted from a first data transceiver associated with the airframe to a second data transceiver associated with the rotor assembly via the electrical circuit completed by the slip ring assembly.

A computer-implemented method and system for transmitting power and data together in a rotorcraft using a slip ring assembly is disclosed. According to one example, a computer-implemented method includes providing a slip ring assembly comprising a stationary element coupled to an airframe of a rotorcraft and a rotatable element rotatable relative to the stationary element and coupled to a rotor assembly of the rotorcraft. Power is transmitted from a power source associated with the airframe to an electronic device associated with the rotor assembly, the slip ring assembly being configured to complete an electrical circuit between the power source and the electronic device to provide power from the power source to the electronic device. Data is transmitted from a first data transceiver associated with the airframe to a second data transceiver associated with the rotor assembly via the electrical circuit completed by the slip ring assembly.

This application provides a motor, a power assembly, and a motor drive device. In this application, the motor includes a grounding ring and a first sealing piece, or includes a grounding ring, a first sealing piece, and a second sealing piece. The grounding ring is electrically connected to a rotating shaft and a housing. Because the grounding ring is made of a material with good conduction performance, a shaft induced voltage transmitted on the rotating shaft can be transmitted to the housing through the grounding ring, instead of being transmitted to the housing through a motor bearing, thereby avoiding bearing electric corrosion of the motor bearing.