A slip ring assembly is used with a surgical shaft assembly. The slip ring assembly includes a slip ring, a first conductor mounted on the slip ring, a commutator rotatable relative to the slip ring, and a second conductor mounted on the commutator. The slip ring assembly further includes a flexible member disposed between the slip ring and the commutator. The flexible member comprises a body and flexible protrusions extending from the body, wherein the flexible protrusions are elastically deformed against the first slip ring.

A slip ring assembly is used with a surgical shaft assembly. The slip ring assembly includes a slip ring, a first conductor mounted on the slip ring, a commutator rotatable relative to the slip ring, and a second conductor mounted on the commutator. The slip ring assembly further includes a flexible member disposed between the slip ring and the commutator. The flexible member comprises a body and flexible protrusions extending from the body, wherein the flexible protrusions are elastically deformed against the first slip ring.

An electric circuit providing a ground connection includes at least two brushes and a contact member, wherein each brush and the contact member form a sliding contact, wherein the contact member is connected to a ground potential by at least one of the sliding contacts, wherein at least two of the sliding contacts are connected to a current source adapted to provide a current through the sliding contacts.

An electric circuit providing a ground connection includes at least two brushes and a contact member, wherein each brush and the contact member form a sliding contact, wherein the contact member is connected to a ground potential by at least one of the sliding contacts, wherein at least two of the sliding contacts are connected to a current source adapted to provide a current through the sliding contacts.

A slip ring assembly is used with a surgical shaft assembly. The slip ring assembly includes a slip ring, a first conductor mounted on the slip ring, a commutator rotatable relative to the slip ring, and a second conductor mounted on the commutator. The slip ring assembly further includes a flexible member disposed between the slip ring and the commutator. The flexible member comprises a body and flexible protrusions extending from the body, wherein the flexible protrusions are elastically deformed against the first slip ring.

Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.

Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.

An electrical connector includes an electrically conductive contact element (122) and a support (70). The contact element (122) is supported by an intermediate element (120) made of an elastically deformable material and connected to the support (70). An electrical connection assembly including a connector of the type is also described.

An electrical connector includes an electrically conductive contact element (122) and a support (70). The contact element (122) is supported by an intermediate element (120) made of an elastically deformable material and connected to the support (70). An electrical connection assembly including a connector of the type is also described.

Provided is an apparatus for treating a substrate including: a processing vessel having a processing space; a support unit for supporting the substrate in the processing space and rotating the substrate; a liquid supply unit for supplying a processing liquid to the substrate; and a heating unit for heating the substrate, wherein the support unit includes: a spin chuck; a rotation driver for rotating the spin chuck; a chuck pin installed on the spin chuck to be rotated with the spin chuck; a chuck pin moving unit for moving the chuck pin between a contact position wherein the chuck pin is in contact with a side portion of the substrate and an open position at which the chuck pin is spaced apart from the side portion of the substrate, and the chuck pin moving unit moves the chuck pin while the substrate is rotated by the spin chuck.