Patent classifications
H01S3/03
Laser light source and a laser crystallization apparatus including the same
A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.
SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH
The present disclosure is directed to systems and methods for controlling a center wavelength. In one example, a method includes estimating a center wavelength error. The method also includes determining a first actuation amount for a first actuator controlling movement a first prism based on the estimated center wavelength error. The method also includes actuating the first actuator based on the actuation amount. The method also includes determining whether the first prism is off-center. The method also includes, in response to determining that the first prism is off-center, determining a second actuation amount for the first actuator and determining a third actuation amount for a second actuator for controlling movement of a second prism. The method also includes actuating the first actuator and the second actuator based on the second and third actuation amounts, respectively. The method finds application in multi-focal imaging operations.
Compact coaxial laser
A compact laser system with a folded annular resonator cavity defined by spherical mirrors (17, 18), enabling the generation of a multipass beam path between the mirrors, each beam pass inclined at a small angle to the axis between the mirrors to form a zig-zag path (28, 29) therebetween. A long optical path is achieved within a short physical structure. The optical resonator cavity is confined in the gap between two cylindrical coaxial electrodes (13, 14) receiving RF power to excite the lasing gas. Apertures (23) are provided in the main cavity mirrors (17, 18), with a high reflectivity end mirror (24) behind one aperture at one end and a partially reflective output coupler (25) at the other end. A channeled ceramic cylindrical element (15, 20) within the annular shaped gap between the two cylindrical electrodes confines the lasing gas to the channels (16).
Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device
A laser chamber apparatus may include a pipe, an inner electrode extending along a longitudinal direction of the pipe and disposed in a through hole in the pipe, an outer electrode including a contact plate extending along the longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and a leaf spring extending along the longitudinal direction of the pipe and configured to press the outer electrode against the pipe. The leaf spring may include leaf spring pieces separated by slits, and the leaf spring pieces may each include a bent section bent along the edge and are configured to press the bar members in a position shifted from the bent sections toward the edge.
Thin film brewster coupling device
A thin film Brewster coupling device configured for low loss transmission of an imposed polarized parallel to plane of incidence 8.5 micron to 11.5 micron wavelength laser beam and simultaneous high reflectivity of a polarized perpendicular to plane of incidence 2 micron to 4 micron wavelength laser beam. The device comprising an optical media substrate and at least one dielectric stack optically coupled to the optical media substrate where the dielectric stack comprises a dielectric layer and an overlayer, the dielectric layer and the overlayer each comprising a thickness of nominally a quarter wavelength of the 2 micron to 4 micron wavelength laser beam, and oriented at near the Brewster Angle to the incident 8.5 micron to 11.5 micron wavelength laser beam. The substrate and dielectric mediums of necessary characteristics to result in low LIDT, high strength, chemical inertness and high thermal conductivity.
DEVICE FOR GENERATING A LASER RADIATION AND ASSOCIATED FABRICATION METHOD
Disclosed is a device for generating a laser radiation including a box and an electrode, the electrode including a column extending along an axial direction and a collar surrounding the column and having a first face perpendicular to the axial direction and a second face parallel to the first face, the second face facing the box. The generating device includes a ring having a third face bearing against the box, the ring defining a hole emerging on the third face and accommodating the collar, the hole being defined along the axial direction by a bearing face arranged in the ring, perpendicular to the axial direction and facing the box, the first face bearing against the bearing face.
LASER CRYSTALLIZATION DEVICE
A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.
LASER CRYSTALLIZATION DEVICE
A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.
LINE NARROWING MODULE, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.
Radio Frequency Slab Laser
A radio frequency, RF, slab laser comprising a live electrode (102) and a ground electrode (108) whose inwardly facing surfaces face each other to form a gap for forming a plasma discharge when the live electrode is supplied with a suitable RF drive signal. The electrodes are enclosed in a vacuum space by a vacuum housing (114) with an access aperture (116). The access aperture is sealed with a vacuum flange (70) that comprises an electrically insulating connector. A plurality of hollow conductors (62) are arranged to extend through the vacuum flange into the vacuum space and connect with the live electrode. The hollow conductors connect to the live electrode to supply it with its RF drive signal and also coolant fluid which is distributed through fluid circulation channels (80a, 80b). Coolant fluid is supplied to the live electrode through certain ones of the hollow conductors and taken out by others.