A laser device configured to emit a coherent optical radiation is provided. The laser device has an amplifier system having a single interferometric optical amplification arrangement or a plurality of interferometric optical amplification arrangements in series, an optical return path of an optical beam emerging from the amplifier system and entering the amplifier system to form an optical ring resonant structure, and a radiation output for extracting a portion of the optical beam emerging from the amplifier system and deliver the extracted portion of the optical beam emerging from the amplifier system as output laser radiation of the laser device.

An optical fiber connector includes: amplifying fibers in which an active element activated by excitation light is added to a core of each of the amplifying fibers. The amplifying fibers are connected together such that an absorption amount of excitation light per unit length increases with an increase of a distance from an incident end of the excitation light. A mode field diameter of laser light propagating through the core is same among the amplifying fibers.

A laser medium unit 10 in a laser beam amplification device includes a plurality of laser media 14. A cooling medium flow path F1 is provided around the laser medium unit 10 to cool the laser medium unit 10 from outside. A sealed space between the laser media 14 is filled with gas or liquid, and a laser beam for passing through the sealed space is not interfered by a cooling medium flowing outside. Therefore, a fluctuation of an amplified laser beam is prevented, and a quality such as stability and focusing characteristics of the laser beam is improved.

A laser medium unit 10 in a laser beam amplification device includes a plurality of laser media 14. A cooling medium flow path F1 is provided around the laser medium unit 10 to cool the laser medium unit 10 from outside. A sealed space between the laser media 14 is filled with gas or liquid, and a laser beam for passing through the sealed space is not interfered by a cooling medium flowing outside. Therefore, a fluctuation of an amplified laser beam is prevented, and a quality such as stability and focusing characteristics of the laser beam is improved.

A compact laser system with a folded annular resonator cavity defined by spherical mirrors (17, 18), enabling the generation of a multipass beam path between the mirrors, each beam pass inclined at a small angle to the axis between the mirrors to form a zig-zag path (28, 29) therebetween. A long optical path is achieved within a short physical structure. The optical resonator cavity is confined in the gap between two cylindrical coaxial electrodes (13, 14) receiving RF power to excite the lasing gas. Apertures (23) are provided in the main cavity mirrors (17, 18), with a high reflectivity end mirror (24) behind one aperture at one end and a partially reflective output coupler (25) at the other end. A channeled ceramic cylindrical element (15, 20) within the annular shaped gap between the two cylindrical electrodes confines the lasing gas to the channels (16).

A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.

A method or apparatus for narrowing the linewidth of a single mode laser is provided. The linewidth of a single mode laser is narrowed by injecting an optical feedback simultaneously into the first laser cavity mirror and the second laser cavity mirror of the single mode laser.

A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.

The present invention describes a laser system for eliminating astigmatism to produce an elliptical laser beam that has an ellipticity between about 0.9 to 1.0. The laser system described herein allows for increased conversion efficiency and output powers. on-linear optical elements in the laser system eliminate astigmatism. The laser system comprises one or more cavities with wavelength splitters that act as dual-minor chambers for single-pass light transmission through the non-linear optical elements to reduce cavity size or as beam splitters for double-pass light transmission through the non-linear optical elements to increase laser output power. The laser system may also include a birefringent filter and/or etalon in the first cavity for polarization and wavelength tuning. The laser system may also generate a high-power, deep-ultraviolet laser output. The laser system may also be devoid of curved mirrors and non-normal incidence reflection to eliminate astigmatism.

Systems and methods for temporal amplitude modulation of an optical beam. An exemplary system may include a birefringent fiber positioned between two polarizers, or between a polarized input light source and an output polarizer. Light may enter the birefringent fiber as linearly polarized. Depending on birefringence and orientation of the birefringent fiber, the polarization state changes as the light propagates through the birefringent fiber. This changed polarization state then enters the output polarizer, for which transmission is a function of the polarization state and the relative orientation of the polarization axis. The polarization state emerging from the birefringent fiber may be changed by modulating the fiber birefringence, for example through application of an external stress. Net transmittance of the system may be varied according to a magnitude of an external force (e.g., pressure) to some or all of the birefringent fiber.