A light source apparatus includes a chamber and a metal fluoride trap coupled to the chamber and configured to provide clean gas to a set of window housing apparatuses coupled to the chamber. Each window housing apparatus is configured to reduce metal fluoride dusting on an optical window and includes a window housing supporting an optical window, an aperture apparatus coupled to the window housing, and an insert disposed between the aperture apparatus and the optical window. The aperture apparatus includes a plurality of cells configured to trap metal fluoride dust flowing upstream from the chamber through the aperture apparatus toward the optical window. The insert is configured to control a first flow rate of the clean gas along the optical window and a second flow

A laser apparatus that can generate a high-quality laser beam is provided. The laser apparatus is provided with a laser medium and an insulation layer. The laser medium has a first surface and a second surface. Incident laser light is incident on the first surface. The second surface totally reflects the incident laser light that is incident to the second surface at an incident angle equal to or larger than a critical angle. The insulation layer covers a second area of the second surface that surrounds a first area of the second surface, the first area totally reflecting the incident laser light. The laser medium is exposed in the first area.

Laser annealing apparatus includes a plurality of frequency-tripled solid-state lasers, each delivering an output beam of radiation at a wavelength between 340 nm and 360 nm. Each output beam has a beam-quality factor (M.sup.2) greater of than 50 in one transverse axis and greater than 20 in another transverse axis. The output beams are combined and formed into a line-beam that is projected on a substrate being annealed. Each output beam contributes to the length of the line-beam.

A laser system comprising a gain medium configured to amplify incident electromagnetic radiation and a nonlinear optical element configured to convert electromagnetic radiation amplified by the gain medium to a shorter wavelength. The laser system is configured to introduce mode competition and nonlinear effects such that the nonlinear optical element produces output electromagnetic radiation having a frequency spectrum comprising a first peak formed of a first group of frequencies and a second peak formed of a second group of frequencies. A trough separates the first and second peaks. The first and second peaks are the only dominant peaks in the frequency spectrum. The output electromagnetic radiation has a coherence curve comprising a contrast ratio of less than about 0.1 at an optical path difference that is within the inclusive range of about 1.5 mm to about 2.5 mm.

A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.

A planar wave guide (PWG) having a first end for coupling to a light pump and a second end opposite to the first end and including a first cladding layer; a second cladding layer; and a uniformly doped core layer between the first cladding layer and the second cladding layer, wherein the core layer is tapered having a smaller thickness at the first end and a larger thickness at the second end, and wherein a ratio of the core thickness to thickness of the cladding layers is smaller at the first end and larger at the second end.

A device includes: at least one laser element with light emitting points to output fundamental waves in a one-dimensional array; a wavelength converting element to carry out wavelength conversion of the incident fundamental waves, and to output wavelength converted light rays; and an output mirror to reflect the fundamental waves, and to transmit the wavelength converted light rays resulting from the wavelength conversion by the wavelength converting element. The wavelength converting element is disposed between the laser element and the output mirror, and the distance between the position of a waist of the fundamental waves output from the laser element and the output mirror is set in accordance with a Talbot condition under which the adjacent light emitting points cause phase synchronization with each other.

A laser comprises a first end mirror and a second end mirror defining an optical cavity therebetween, a first gain medium and a second gain medium positioned in the optical cavity, at least one radiation source configured to provide pump radiation to the first and second gain media, wherein the pump radiation comprises a first pump beam directed to be incident on the first gain medium and a second pump beam directed to be incident on the second gain medium so as to stimulate emission of radiation from the first and second gain media thereby establishing a laser beam in the optical cavity and a control apparatus operable to adjust a property of at least one of the first and second pump beams and thereby control a thermal lens of at least one of the first and second gain media so as to substantially remove an instability zone from the power curve of the laser.

In a Q-switched solid-state laser having a resonator (3, 30) in the form of a linear resonator or a ring resonator having an active laser material (1) and at least one first and one second mirror (4, 5) and a resonator length (a) of less than 50 mm, preferably less than 25 mm, in the case of the configuration as a linear resonator and of less than 100 mm, preferably less than 50 mm, in the case of the configuration as a ring resonator, at least substantially only one longitudinal mode oscillates in the resonator (3). The resonator (3, 30) is in the form of an unstable resonator, with one of the mirrors (4, 5) being a gradient mirror.

A method and apparatus for characterizing an optical element. The optical element is part of a laser and is mounted on a translation stage to scan the optical element transverse to an intracavity laser beam. A performance characteristic of the laser is recorded as a function of position of the optical element.