A device for the generation of ultrashort pulses, wherein an oscillator is formed by: a first and a second non-overlapping transmission band-pass filter, which can serve as reflecting end element of the oscillator; optically transparent means with non-linear Kerr coefficient χ.sup.(3) different from zero configured to achieve a spectral broadening by self-phase modulation of the signal transiting through these means; an optical waveguide that produces a positive gain; a node configured to receive a trigger signal designed to activate the operation of the oscillator; a trigger signal generating device comprising: a laser source, for example a microchip, configured to generate a laser pulse, preferably with a minimum bandwidth, having a duration of hundreds of ps, up to the ns; a coupling system designed to introduce the pulse of the trigger laser into a waveguide made of an optically transparent material characterised by a non-linear Kerr coefficient χ.sup.(3) different from zero, which is configured to produce two distinct effects in order to spectrally broaden the pulse of the trigger laser, and precisely: a) self-phase modulation four-wave mixing; the output of the waveguide supplies the trigger signal to the node. The pulses produced by the oscillator typically have a duration of the order of the picosecond and are easily reduced to the Fourier limit of circa 100 femtoseconds by means of a dispersive device.

A technology is described for a Photonic Integrated Circuit (PIC) radio frequency (RF) oscillator. The PIC RF oscillator can comprise an optical gain media coupled to a first mirror and configured to be coupled to the PIC. The PIC can comprise a first optical cavity located within the PIC, a tunable mirror to form a first optical path between the first mirror in the gain media and the first tunable mirror, and a frequency tunable intra-cavity dual tone resonator positioned within the first optical cavity to constrain the first optical cavity having a common optical path to produce tow primary laser tones with a tunable frequency spacing. A photo detector is optically coupled to the PIC and configured to mix the two primary laser tones to form an RF output signal with a frequency selected by the tunable frequency spacing of the two primary tones.

An exposure method includes reading data representing a relationship between a first parameter relating to an energy ratio between energy of first pulsed laser light having a first wavelength and energy of second pulsed laser light having a second wavelength longer than the first wavelength and a second parameter relating to a sidewall angle of a resist film that is the angle of a sidewall produced when the resist film is exposed to the first pulsed laser light and the second pulsed laser light, and determining a target value of the first parameter based on the data and a target value of the second parameter; and exposing the resist film to the first pulsed laser light and the second pulsed laser light by controlling a narrowed-line gas laser apparatus to output the first pulsed laser light and the second pulsed laser light based on the target value of the first parameter.

A line narrowing device includes first and second prisms disposed at positions different in a wavelength dispersion direction of any of the first and second prisms, a third prism disposed on the optical path of an optical beam and through which the beam width of the optical beam is enlarged and first and second parts of the optical beam are incident on the first and second prisms, respectively, a grating disposed across the optical path of the first part having passed through the first prism and the optical path of the second part having passed through the second prism, a first actuator configured to adjust the incident angle of the first part on the grating, a second actuator configured to adjust the incident angle of the second part on the grating, and a third actuator configured to adjust an energy ratio of the first and second parts.

A control method for a line narrowed gas laser apparatus is a control method for a line narrowed gas laser apparatus configured to emit a pulse laser beam including a first wavelength component and a second wavelength component. The apparatus includes a laser chamber including a pair of electrodes, an optical resonator including an adjustment mechanism configured to adjust a parameter of an energy ratio of the first and second wavelength components, and a processor in which relation data indicating a relation of the parameter of the energy ratio with a control parameter of the adjustment mechanism is stored. The control method includes receiving a command value of the parameter of the energy ratio from an external device, and acquiring, based on the relation data, a value of the control parameter corresponding to the command value and controlling the adjustment mechanism based on the value of the control parameter.

A control method of a line narrowing gas laser device includes receiving a command of either a single-wavelength mode command or a multi-wavelength mode command from an external apparatus, and controlling the line narrowing gas laser device to generate pulse laser light in accordance with the command.

A narrowed-line gas laser apparatus includes a laser chamber that accommodates a pair of electrodes disposed so as to face each other, an output coupling mirror, and a line narrowing apparatus that forms an optical resonator along with the output coupling mirror, the line narrowing apparatus including an optical system having a first region and a second region on which a first portion and a second portion of a light beam that exits out of the laser chamber are incident, the first and second portions passing through different positions in a direction in which the pair of electrodes face each other, the optical system being configured to suppress an increase in the distance between the optical path axis of the first portion and the optical path axis of the second portion.

The invention discloses a Raman laser apparatus including a linear cavity having a first direction and a second direction opposite to the first direction, the linear cavity including along the first direction: a first optical component, a gain medium, a Raman medium, a lithium triborate (LBO) crystal and a second optical component. The first optical component receives an incident pumping light in the first direction. The gain medium receives the pumping light from the first optical component, and generates a first infrared base laser having a first wavelength. The Raman medium receives the first infrared base laser, and generates a second infrared base laser having a second wavelength. The LBO crystal receives the first and the second infrared base lasers, and generates a visible laser light having a third wavelength. The second optical component is configured to allow the visible laser light to be transmitted out along the first direction.

A dual-wavelength gun aiming collimated beam light source module, comprising: a positioning seat, having a first through hole and a second through hole inside; a first laser module for emitting laser light of first wavelength; a second laser module for emitting laser light of second wavelength; a first reflecting mirror, and the inner surface of the first reflecting mirror has a first wavelength laser light high-reflection coating; and a second reflecting mirror, and the outer surface of the second reflecting mirror has a first wavelength laser light high-reflection coating and a second wavelength laser light high-reflection coating; so as to solve the aiming deviation problem.

A laser apparatus includes a first optical element, a second optical element, a first actuator configured to change a first wavelength component included in a pulse laser beam by changing a posture of the first optical element, a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element, a first encoder configured to measure a position of the first actuator, a second encoder configured to measure a position of the second actuator, and a processor. The processor reads a first relation and a second relation and performs control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder.