A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, one or more proximal-side electrostatic cavities are defined between the VCSEL device and the membrane device and used to displace the mirror to decrease a size of an optical cavity.

Systems and methods described herein are directed to optical light sources, such as an external cavity laser (ECL) with an active phase shifter. The system may include control circuitry for controlling one or more parameters associated with the active phase shifter. The phase shifter may be a p-i-n phase shifter. The control circuitry may cause variation in a refractive index associated with the phase shifter, thereby varying a lasing frequency of the ECL. The ECL may be configured to operate as a light source for a light detection and ranging (LIDAR) system based on generating frequency modulated light signals. In some embodiments, the ECL may generate an output LIDAR signal with alternating segments of increasing and decreasing chirp frequencies. The ECL may exhibit increased stability and improved chirp linearities with less dependence on ambient temperature fluctuations.

Methods and apparatus for a controlling a stimulus source to direct photons to a pixel in a pixel array contained in a detector system, analyzing a response of the pixel in the pixel array; and generating an alert based on the response of the pixel in the pixel array. Example stimulus sources include a conductive trace, a PN junction, and a current source.

A laser device includes a seed laser, a plurality of optical amplifiers, and an optical distribution assembly. The seed laser is configured to emit seed laser light. The plurality of optical amplifiers is configured to generate amplified laser light by amplifying the seed laser light. The optical distribution assembly is configured to distribute the seed laser light to an input of each of the optical amplifiers in the plurality and each of the optical amplifiers is configured to direct its respective amplified laser light to a common target.

The present disclosure generally relates optical amplifier modules. In one form for example, an optical amplifier module includes a booster optical amplifier configured to increase optical power of a first optical signal. The module also includes a preamp optical amplifier configured to increase optical power of a second optical signal and a pump laser optically coupled to the booster optical amplifier and the preamp optical amplifier. The pump laser is configured to provide a booster power to the booster optical amplifier and a preamp power to the preamp optical amplifier, the preamp power is effective to induce a gain in optical power to provide a target optical power of the second optical signal from the preamp optical amplifier, and the booster power is dependent on the preamp power.

An apparatus may include a diode-pumped solid-state laser oscillator configured to output a pulsed laser beam, a modulator configured to modify an energy and a temporal profile of the pulsed laser beam, and an amplifier configured to amplify an energy of the pulse laser beam. A modified and amplified beam to laser peen a target part may have an energy of about 5J to about 10 J, an average power (defined as energy (J) x frequency (Hz)) of from about 25 W to about 200 W, with a flattop beam uniformity of less than about 0.2. The diode-pumped solid-state oscillator may be configured to output a beam having both a single longitudinal mode and a single transverse mode, and to produce and output beams at a frequency of about 20 Hz.

The stability of operations of an EUV light generating apparatus is improved. A droplet detector may include: a light source unit configured to emit illuminating light onto a droplet, which is output into a chamber and generate extreme ultraviolet light when irradiated with a laser beam; a light receiving unit configured to receive the illuminating light and to detect changes in light intensities; and a timing determining circuit configured to output a droplet detection signal that indicates that the droplet has been detected at a predetermined position within the chamber, based on a first timing at which the light intensity of the illuminating light decreases due to the droplet being irradiated therewith and a second timing at which the light intensity of the illuminating light increases.

The stability of operations of an EUV light generating apparatus is improved. A droplet detector may include: a light source unit configured to emit illuminating light onto a droplet, which is output into a chamber and generate extreme ultraviolet light when irradiated with a laser beam; a light receiving unit configured to receive the illuminating light and to detect changes in light intensities; and a timing determining circuit configured to output a droplet detection signal that indicates that the droplet has been detected at a predetermined position within the chamber, based on a first timing at which the light intensity of the illuminating light decreases due to the droplet being irradiated therewith and a second timing at which the light intensity of the illuminating light increases.

A system includes a master oscillator configured to generate a low-power optical beam. The system also includes a planar waveguide (PWG) amplifier configured to receive the low-power optical beam and generate a high-power optical beam having a power of at least about ten kilowatts. The PWG amplifier includes a single laser gain medium configured to generate the high-power optical beam. The single laser gain medium can reside within a single amplifier beamline of the system. The master oscillator and the PWG amplifier can be coupled to an optical bench assembly, and the optical bench assembly can include optics configured to route the low-power optical beam to the PWG amplifier and to route the high-power optical beam from the PWG amplifier. The PWG amplifier could include a cartridge that contains the single laser gain medium and a pumphead housing that retains the cartridge.

An optical amplifier of the present disclosure includes a Raman amplification unit and a parametric amplification unit that is configured of a second-order nonlinear element including a PPLN waveguide. In the optical amplifier, second harmonic lights are generated from a fundamental wave light having a wavelength that is slightly detuned to a shorter wavelength side with respect to a phase matching wavelength of the second-order nonlinear element, and is utilized as excitation light for the parametric amplification unit. By utilizing the excitation light based on the fundamental wave light of the wavelength detuned from the phase matching wavelength, a phase matching curve can be obtained in a wide band in a difference frequency generation (DFG) process of the second-order nonlinear element. The reduction in conversion efficiency of the wavelength near the excitation light in the parametric amplification unit is compensated by the Raman amplification unit.