An apparatus includes a decision module that is configured to: receive a performance metric relating to performance conditions of an optical system emitting a light beam; estimate, based on the performance metric and a predetermined learning model, an effectiveness of a proposed change to the optical system; and output a change command to the optical system if it is estimated that the proposed change to the optical system would be effective.

A laser apparatus includes at least one electro-optic (EO) medium through which a polarized laser beam passes for N times, forming a plurality of first-pass to Nth-pass beams, by reflecting the polarized laser beam from at least one reflection mirror, and a power supplier configured to alternately provide a 1/N of a half-wave (λ/2) or quarter-wave (λ/4) voltage and remove the voltage to the EO medium, λ being a wavelength of the polarized laser beam. The at least one EO medium is tilted at angle θ and/or angle di with respect to one of the plurality of first-pass to Nth-pass beams. The at least one EO medium comprises a M number of EO mediums, and the power supplier is configured to alternately provide a 1/M*N of a half-wave (λ/2) or quarter-wave (λ/4) voltage and remove the voltage to each of the M number of EO mediums.

A system for generating extreme ultraviolet light, in which a target material inside a chamber is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus configured to output a first laser beam, a second laser apparatus configured to output a pedestal and a second laser beam, and a controller connected to the first and second laser apparatuses and configured to cause the first laser beam to be outputted first, the pedestal to be outputted after the first laser beam, and the second laser beam having higher energy than the pedestal to be outputted after the pedestal.

A laser source for an ophthalmic surgical system includes a femtosecond seeder, an amplifier, a femtosecond pulse portion, a nanosecond pulse portion, and one or more switches. The femtosecond seeder generates femtosecond pulses. The amplifier amplifies laser pulses, which include the femtosecond pulses and nanosecond pulses. The amplifier amplifies the laser pulses by amplifying the femtosecond pulses and generating and amplifying the nanosecond pulses. The femtosecond pulse portion alters and outputs the femtosecond pulses, and the nanosecond pulse portion alters and outputs the nanosecond pulses. The switches receive the laser pulses from the amplifier, and direct the laser pulses to the femtosecond pulse portion or the nanosecond pulse portion. In other embodiments, the laser source includes a femtosecond seeder and a nanosecond seeder that generates the nanosecond pulses.

A laser apparatus may include: a quantum cascade laser outputting, based on a supplied current, laser light at an oscillation start timing when a first delay time elapses from a current rising timing of the supplied current: an amplifier disposed in a laser light optical path, and selectively amplifying light of a predetermined wavelength to output the amplified laser light to a chamber including a plasma generation region into which a target is fed; and a laser controller controlling a third delay time, from an output timing of a laser output instruction to the current rising timing, to cause a laser light wavelength to be equal to the predetermined wavelength at an aimed timing when a second delay time elapses from the oscillation start timing, based on oscillation parameters including the first delay time, a supplied current waveform, and a device temperature of the quantum cascade laser.

A driving circuit is a circuit selectively outputting one of a staircase wave and a square wave from an output terminal, to drive a capacitive load, and includes a first power source supplying a constant voltage VH, a first FET connected between the output terminal and the first power source, a first transformer in which an output side coil is connected to a gate of the first FET, a first input terminal connected to an input side coil of the first transformer via a capacitive element, a second power source supplying a constant voltage VL, a second FET connected between the output terminal and the second power source, a second transformer in which an output side coil is connected to a gate of the second FET, and a second input terminal connected to an input side coil of the second transformer via a capacitive element.

A laser amplifier for a green laser pulse includes at least one gain medium doped with praseodymium and at least one gallium nitride based diode laser for pumping the gain medium. A green seed laser pulse going through the gain medium becomes an amplified green laser pulse.

A multipass laser amplifier includes a mirror, a mirror device, a gain crystal, and refractive or diffractive beam-steering element. The gain crystal is positioned on a longitudinal axis of the multipass laser amplifier between the mirror and the mirror device. The beam-steering element is positioned on the longitudinal axis between the gain crystal and the mirror device. The beam-steering element has no optical power and deflects a laser beam, by refraction or diffraction, for each of multiple passes of the laser beam between the first mirror and the mirror device, such that each pass goes through the gain crystal for amplification of the laser beam and goes through a different respective off-axis portion of the beam-steering element. The no optical power of the beam-steering element enables maintaining a large beam size in the gain crystal, thereby facilitating amplification to high average power.

A laser device is a laser device that includes an output unit that outputs seed light to a light amplifying unit. The output unit has a light source unit that outputs, as the seed light, rays of light with a plurality of wavelengths lying within a gain range of the light amplifying unit, and a seed light control unit that controls an intensity-time waveform of the seed light output from the light source unit.

A resonating optical amplifier includes a laser pump cavity defined by a first mirror and a second mirror with a laser pump gain medium configured within a first portion of the laser pump cavity and a Raman amplifier within a second portion of the laser pump cavity. A circulating pump-laser light is introduced to the laser pump gain medium forming a pump signal that is configured to bi-directionally propagate along a beam path within the laser pump cavity. The Raman amplifier is positioned in line with the beam path of the pump signal and operable to impart gain on a seed pulse. The seed pulse and the pump signal are co-aligned and linearly polarized.