An optical device is provided that includes an active waveguide having a top electrode and a plurality of layers including a gain layer. Configurations are disclosed for the active waveguide to enable amplification of a guided optical wave profile while preserving a shape of a lateral optical intensity profile of the guided optical wave as the guided optical wave is amplified along the waveguide. The top electrode and/or one or more layers of the active optical waveguide may be tailored to provide a tailored optical gain.

A disclosed semiconductor laser module includes a semiconductor laser device; a semiconductor optical amplifier configured to receive laser light emitted from the semiconductor laser device and amplify the laser light that has been received; and a first light receiving device that measures an intensity of a part of the laser light emitted from the semiconductor laser device, for monitoring a wavelength of the laser light, wherein the semiconductor optical amplifier is located rearward in relation to a light receiving surface of the first light receiving device along a propagation direction of the laser light emitted from the semiconductor device.

There is provided a method of operating a laser. The method comprises receiving a target power and calculating an operating power of a lasing module of the laser. The operating power may be calculated based on the target power and a minimum lasing power of the lasing module. The method also comprises determining an operating current for the lasing module based on the operating power, and driving the lasing module at the operating current to produce an output light having the operating power. In addition, the method comprises providing the output light to an optical modulator of the laser, and operating the optical modulator to modulate the output light to have an output power corresponding to the target power.

In a laser system according to a viewpoint of the present disclosure, a first amplifier amplifies first pulsed laser light outputted from a first semiconductor laser system into second pulsed laser light, a wavelength conversion system converts the second pulsed laser light in terms of wavelength into third pulsed laser light, and an excimer amplifier amplifies the third pulsed laser light. The first semiconductor laser system includes a first current controller that controls current flowing through a first semiconductor laser in such a way that first laser light outputted from the first semiconductor laser is caused to undergo chirping and a first semiconductor optical amplifier that amplifies the first laser light into pulsed light. The laser system includes a control section that controls the amount of chirping performed on the first pulsed laser light in such a way that excimer laser light having a target spectral linewidth is achieved.

A laser system according to one aspect of the present disclosure includes a wavelength-variable first solid-state laser device configured to output a first pulse laser beam; a wavelength conversion system including a first nonlinear crystal configured to wavelength-convert the first pulse laser beam and a first rotation stage configured to change a first incident angle of the first pulse laser beam on the first nonlinear crystal; an excimer amplifier configured to amplify a pulse laser beam wavelength-converted by the wavelength conversion system; and a control unit configured to receive, from an external device, data of a target center wavelength of an excimer laser beam output from the excimer amplifier, control a wavelength of the first pulse laser beam in accordance with the instructed target center wavelength, and control the first incident angle on the first nonlinear crystal in accordance with an average value of the target center wavelength.

In a laser system according to a viewpoint of the present disclosure, a first amplifier amplifies first pulsed laser light outputted from a first semiconductor laser system into second pulsed laser light, a wavelength conversion system converts the second pulsed laser light in terms of wavelength into third pulsed laser light, and an excimer amplifier amplifies the third pulsed laser light. The first semiconductor laser system includes a first current controller that controls current flowing through a first semiconductor laser in such a way that first laser light outputted from the first semiconductor laser is caused to undergo chirping and a first semiconductor optical amplifier that amplifies the first laser light into pulsed light. The laser system includes a control section that controls the amount of chirping performed on the first pulsed laser light in such a way that excimer laser light having a target spectral linewidth is achieved.

There is provided a method of operating a laser. The method comprises receiving a target power and calculating an operating power of a lasing module of the laser. The operating power may be calculated based on the target power and a minimum lasing power of the lasing module. The method also comprises determining an operating current for the lasing module based on the operating power, and driving the lasing module at the operating current to produce an output light having the operating power. In addition, the method comprises providing the output light to an optical modulator of the laser, and operating the optical modulator to modulate the output light to have an output power corresponding to the target power.

The present invention provides an optical amplification apparatus for amplifying light from a light source, comprising: a combiner configured to output light received at a first input port from the light source as first light, and output light received at a second input port as second light; an optical amplifier configured to amplify an intensity of each of the first light and the second light output from the combiner; a splitter configured to output the received first light from a first output port, and output the received second light from a second output port; and an optical modulator configured to attenuate an intensity of light output from the first output port of the splitter, wherein the light output from the first output port of the splitter is received at the second input port of the combiner via the optical modulator.

A disclosed semiconductor laser module includes a semiconductor laser device; a semiconductor optical amplifier configured to receive laser light emitted from the semiconductor laser device and amplify the laser light that has been received; and a first light receiving device that measures an intensity of a part of the laser light emitted from the semiconductor laser device, for monitoring a wavelength of the laser light, wherein the semiconductor optical amplifier is located rearward in relation to a light receiving surface of the first light receiving device along a propagation direction of the laser light emitted from the semiconductor device.

A laser system according to one aspect of the present disclosure includes a wavelength-variable first solid-state laser device configured to output a first pulse laser beam; a wavelength conversion system including a first nonlinear crystal configured to wavelength-convert the first pulse laser beam and a first rotation stage configured to change a first incident angle of the first pulse laser beam on the first nonlinear crystal; an excimer amplifier configured to amplify a pulse laser beam wavelength-converted by the wavelength conversion system; and a control unit configured to receive, from an external device, data of a target center wavelength of an excimer laser beam output from the excimer amplifier, control a wavelength of the first pulse laser beam in accordance with the instructed target center wavelength, and control the first incident angle on the first nonlinear crystal in accordance with an average value of the target center wavelength.