A transfer apparatus includes a first linear transfer part which moves a slider in a first direction by using a first fixed linear module fixed on a first base; a module moving part which moves a module holding member holding a movable linear module in a second direction different from the first direction, to position the movable linear module at a first coupling position to couple with the first fixed linear module and cause the slider to transfer between the movable and first fixed linear modules; a linear scale having a scale extending in the second direction and a sensor which detects the scale; and a controller which acquires first module position information indicating a position of the movable linear module relative to the first fixed linear module in the second direction and controls movement of the module holding member based on the first module position information.

An electronic motor with a stator core having a plurality of holes for receiving a plurality of conductors, each conductor comprising a substantially linear body portion extending within the holes of the stator core, and a stator drive member adjacent each end of the stator core, the stator end member adjacent at least one end of the stator core including electronic control circuitry electrically coupled to at least some of the conductors. Also, a method of manufacturing an electronic motor by providing a stator with a plurality of holes having conductors within at least some of the plurality of holes, said conductors each having a substantially linear body portion extending through the stator core, and placing a drive member on each end of the stator core, at least one of the drive members provided with electronic circuitry, where the conductors are electrically coupled to the circuitry in the drive member.

A press includes a horizontal electric linear actuator; a stationary upper frame; a press travel plate; and a press toggle linkage. The press toggle linkage is connected to the stationary upper frame and to the electric linear actuator to move the press travel plate vertically.

A press includes a horizontal electric linear actuator; a stationary upper frame; a press travel plate; and a press toggle linkage. The press toggle linkage is connected to the stationary upper frame and to the electric linear actuator to move the press travel plate vertically.

A rotating electromagnetic machine has a tubular axle with mounting rings, a common ring, a coil input ring, and at least one bearing set mounted on it. A fitting is secured at a distal end of the tubular axle, and a commutator is secured at the proximal end. A housing is mounted on the bearing sets through adaptors. Connecting bars extend axially within the axle with lateral rods joined to the connecting bars at their distal ends, the bars commuting between segments of the commutator electromagnetic coils. A plurality of the electromagnetic coils are secured to the coil input ring. The coils are formed of spiral turns of a single flat strip electrically conductive material. A plurality of peripheral and sector magnets are mounted adjacent to the electromagnetic coils with electromagnetic interaction when relative motion occurs between the coils and the magnets.

A rotating electromagnetic machine has a tubular axle with mounting rings, a common ring, a coil input ring, and at least one bearing set mounted on it. A fitting is secured at a distal end of the tubular axle, and a commutator is secured at the proximal end. A housing is mounted on the bearing sets through adaptors. Connecting bars extend axially within the axle with lateral rods joined to the connecting bars at their distal ends, the bars commuting between segments of the commutator electromagnetic coils. A plurality of the electromagnetic coils are secured to the coil input ring. The coils are formed of spiral turns of a single flat strip electrically conductive material. A plurality of peripheral and sector magnets are mounted adjacent to the electromagnetic coils with electromagnetic interaction when relative motion occurs between the coils and the magnets.

The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

An optical mechanism is provided. The optical mechanism includes an immovable part, a movable part, a drive assembly, and a guidance assembly. The movable part is connected to an optical element. The movable part is movable relative to the immovable part. The drive assembly drives the movable part to move relative to the immovable part. The guidance assembly guides the movable part to move along a first axis.

A filling machine for filling capsules with at least one product includes operating stations for operating on the capsules, and a moving system for transferring the capsules through the operating stations that include first and second dosing stations that are configured to fill the capsules with respective products. The moving system includes a linear electric motor, a guide rail, which includes a stator of the motor, and transfer carriages associated with the guide rail and provided with respective seats to house bodies and caps of the capsules. The transfer carriages have respective rotors of the motor interacting independently with respective magnetic fields generated by the stator to move the respective transfer carriages along the guide rail with an intermittent motion at the first dosing station when the first dosing station is activated and/or with a continuous motion at the second dosing station when the second dosing station is activate.