The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

The invention relates to a linear motor structure for a sliding door, comprising a rotor assembly, wherein the rotor assembly includes a fixed part and a movable part, the fixed part is provided with a permanent magnet, a slot hole is formed in a bottom part of the permanent magnet, the movable part is provided with a telescopic rod that is slidably inserted into the slot hole from one end of the slot hole, and a motion transmission part capable of transmitting a motion of the rotor assembly, and the movable part and the fixed part are fixed by a fastener. The linear motor structure is novel in design, reasonable in structure and favorable in adaptability due to the capability of flexibly adjustment of the rotor assembly according to a width of a door frame.

An elevator system includes an elevator car to travel in a hoistway; a linear propulsion system to impart force to the elevator car, the linear propulsion system including: a secondary portion mounted to the elevator car, the secondary portion including a plurality of magnetic poles; and a primary portion mounted in the hoistway, the primary portion including a plurality of coils; and a drive coupled to the primary portion, the drive providing drive signals to at least a section of the primary portion; wherein the drive generates 6 phases of drive signals, each coil associated with one of the 6 phases.

To provide a motor system that can control the position of a control object in multiple directions while suppressing the number of required switching elements. A motor system includes: a power conversion device including first, second, and third up-down arms each including two switching elements connected in series; a control object; and a first load including a magnetic pole tooth facing the control object, and a winding wound around the magnetic pole tooth. The motor system includes a second load including two magnetic pole teeth facing each other in a second direction with the control object therebetween, and a winding wound around one or both of the magnetic pole teeth. The power conversion device provides a force with respect to a first direction to the control object through an output to the first load, and provides a force with respect to the second direction to the control object through an output to the second load.

A rotor of a motor according to the present invention comprises: a shaft; a rotor core having a shaft insertion hole, into which the shaft is inserted and coupled; a magnet coupled to the outer peripheral surface of the rotor core; and a rotor cover comprising an upper cap and a lower cap, which cover the upper and lower portions of the rotor core and of the magnet, respectively, wherein the outer periphery of the rotor core comprises a first corner portion and a second corner portion, and the inner periphery of the magnet comprises a first inner peripheral portion, which corresponds to the first corner portion, and a second inner peripheral portion, which corresponds to the second corner portion.

A magnetic gravity compensator comprises a stator (1), a rotor (2), a base (4) and an adjustment mechanism (6). The stator (1) is disposed on the base (4), and the rotor (2) is levitated with respect to the stator (1). The stator (1) comprises a central cylindrical magnet (11) that is fixed to the base (4) by the adjustment mechanism (6) and consists of at least two arc magnets (111). The adjustment mechanism (6) has a first end fixed to the base (4) and a second end securely connected to the at least two arc magnets (111). The adjustment mechanism (6) is configured to drive the at least two arc magnets (111) to synchronously move radially with respect to a central axis of the central cylindrical magnet (11) so as to change a magnetic circuit between the central cylindrical magnet (11) and the rotor (2), and thereby adjust a magnetic levitation force between the stator (1) and the rotor (2).

This application provides a method for controlling a planar drive system, where the planar drive system comprises at least a controller, a stator module having a stator surface, and a rotor that may is positionable and movable on the stator surface. The method comprises positioning an object on a rotor in a first arrangement state of the object in a positioning step, carrying out an accelerating movement of a defined movement pattern of the rotor; and, by the accelerating movement, arranging the object positioned on the rotor in the first arrangement state in a second arrangement state relative to the rotor, in an arranging step. The application further provides a planar drive system.

A method for controlling a planar drive system includes determining values of magnetic stator fields for different energizing currents and spatial regions in a two-dimensional array of magnetic field sensors, generating at least one magnetic stator field by applying energizing currents to stator conductors to electrically control a rotor, determining measured values of a total magnetic field via the magnetic field sensors for a plurality of the spatial regions to determine a position of the rotor, compensating contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the magnetic field sensors, generating measured values of the magnetic field determined by the respective magnetic field sensors for the respective space regions, and determining a position of the rotor based on the generated measured values of the magnetic fields. The planar drive system includes at least a controller, a stator module, and a rotor.

A method for controlling a planar drive system includes generating a position allocating function, in an allocation generating step; measuring a plurality of measuring values of the magnetic rotor field by magnetic field sensors for a position of the rotor relative to the stator module, in a magnetic rotor field determining step; applying the position determination function to the plurality of measuring values of the magnetic rotor field of the plurality of magnetic field sensors, in a measuring value analysis step; and determining the position of the rotor relative to the stator module on the basis of the measurements of the magnetic rotor field measured by the plurality of magnetic field sensors and based on the allocations of the position allocating function, in a position determining step. The application further relates to such a planar drive system.

Various aspects of the present disclosure are directed to a transport device in the form of a planar motor. In one embodiment, the transport device includes at least one transport segment, first and second coil groups, frive magnets and a control unit. The at least one transport segment forms a transport plane and includes at least one transport unit that moves in the transport plane at least two-dimensionally along two main movement directions. The first coil group, which defines the first main movement direction and has first drive coils, is arranged on the at least one transport segment. The second coil group defines the second main movement direction and has second drive coils is arranged on the at least one transport segment. The drive magnets are arranged on the at least one transport unit. The control unit controls the first drive coils, and the second drive coils.