An actuator has a flexible electrode having flexibility, and a base electrode having an opposed face that is opposed to the flexible electrode and is covered with an insulating layer. The flexible electrode deforms to get closer to the opposed face when a voltage is applied to the flexible electrode and the base electrode. The flexible electrode is a rotating body placed on the opposed face. The base electrode is divided into a plurality of electrode portions insulated from each other. The electrode portions are arranged along a predetermined direction. The flexible electrode moves in the predetermined direction relative to the base electrode, while rotating on the opposed face, when the voltage is sequentially applied to the electrode portions in the predetermined direction.

An electronic watch includes a power source, an electrostatic motor including a rotor in which a plurality of electret films are arranged in a rotational direction and a plurality of fixed electrodes arranged in the rotational direction at positions facing the rotor, a hand rotating in conjunction with the rotation of the rotor, and a motor control circuit controlling the electrostatic motor. The motor control circuit selectively executes a hand movement mode for rotating the hand and a stop mode for keeping the hand stationary. In the stop mode, the motor control circuit keeps the rotor stationary through electrostatic forces exerted on the electret films from the fixed electrodes with the polarities of the fixed electrodes maintained.

Disclosed is a micro electrostatic motor that includes a body having a first and a second face and having a chamber. A first membrane is disposed over the first face of the body and a rotatable disk is disposed in the circular chamber about a member. The disk is disposed in the circular chamber and is free to rotate about the member. The disk has on a first surface thereof a set of three mutually electrically isolated electrodes, with each of the electrodes having a tab portion and being electrically isolated from the member. A second membrane is disposed over the second face of the body and a pair of spaced electrodes are provided on portions of the second membrane, with the pair of spaced electrodes being isolated by a gap between the pair of electrodes. A cylindrical shaped member is disposed in the chamber electrically isolated from the three mutually electrically isolated electrodes on the disc.

An electrostatic machine includes a drive electrode and a stator electrode. The drive electrode and the stator electrode are separated by a gap and form a capacitor. The drive electrode is configured to move with respect to the stator electrode. The electrostatic machine further includes a housing configured to enclose the drive electrode and the stator electrode. The stator electrode is fixed to the housing. The electrostatic machine also includes a dielectric fluid that fills a void defined by the housing, the drive electrode, and the stator electrode. The dielectric fluid includes an ester.

A generator/controller for electrostatic motors exploits properties of a delta-connected electrostatic motor to accommodate high common mode DC offset voltages thus permitting construction of an electrostatic drive circuit outputting unipolar sinusoidal power and having a substantial reduction in the complexity and size.

Disclosed herein is an integrated component formed by a first wafer having first and second trenches defined in a top surface thereof, and a second wafer coupled to the first wafer and formed by a substrate with a structural layer thereon that integrated an electromagnetic radiation detector overlying the second trench. A first cap is coupled to the second wafer, overlies the electromagnetic radiation detector, and serves to define a first air-tight chamber in which the electromagnetic radiation detector is positioned. A stator, a rotor, and a mobile mass are integrated within the substrate and form a drive assembly for driving the mobile mass. The rotor overlies the first trench. A second cap is coupled to the second wafer, overlies the mobile mass, and serving to define a second air-tight chamber in which the mobile mass is positioned.

An example electrostatic machine includes a number of stator plates, each having a stator electrode and rotationally fixed to a housing, a shaft at least partially defined within the housing and configured to rotate about an axis, and a number of rotor plates, each having a rotor electrode and rotational fixed to the shaft. The electrostatic machine includes a dielectric fluid disposed in the housing, and that fills a gap between the stator plates and the rotor plates. The electrostatic machine includes a seal associated with the shaft, where the seal includes a material compatible with the dielectric fluid.

An actuator has a flexible electrode having flexibility, and a base electrode having an opposed face that is opposed to the flexible electrode and is covered with an insulating layer. The flexible electrode deforms to get closer to the opposed face when a voltage is applied to the flexible electrode and the base electrode. The flexible electrode is a rotating body placed on the opposed face. The base electrode is divided into a plurality of electrode portions insulated from each other. The electrode portions are arranged along a predetermined direction. The flexible electrode moves in the predetermined direction relative to the base electrode, while rotating on the opposed face, when the voltage is sequentially applied to the electrode portions in the predetermined direction.

Provided are an electromechanical transducer including a light movable member that is easy to move and charged portions whose amount of electrostatic charge does not substantially change over time and a method for manufacturing such an electromechanical transducer. The electromechanical transducer using electrostatic interaction between a charged portion and a counter electrode to perform transduction between electric power and motive power includes a fixed substrate, a movable member being movable with a predetermined distance maintained between the fixed substrate and the movable member, the movable member having grooves in a surface facing the fixed substrate, the grooves being formed at intervals in a moving direction of the movable member, charged portions formed on the surface of the movable member so as to alternate with the grooves; counter electrodes disposed on a surface of the fixed substrate in the moving direction, the surface facing the movable member, and a cover layer containing copper and covering at least side walls of the movable member inside the grooves.

An actuator with a stack of thin layers operates by electrowetting droplets between the layers. The actuator includes a first layer structure and a second layer structure positioned adjacent to the first layer structure. One or more liquid droplets are pinned to one of the layers and are positioned between the layers. The other layer includes electrodes. When the electrodes are energized, they electrostatically attract the liquid droplets to create relative motion between the two layers.