An acoustic device includes a piezoelectric element, an attachment member to which the piezoelectric element is attached, and a spacer. The piezoelectric element includes first and second principal surfaces opposing each other. The attachment opposes the first principal surface. The spacer is disposed between the piezoelectric element and the attachment member in such a manner as to form an acoustic space between the piezoelectric element and the attachment member. The spacer includes an adhesive layer including a principal surface in contact with the first principal surface and a principal surface in contact with the attachment member.

Provided are a vibration-suppressing mechanism that has excellent maintainability and can effectively control vibration of a column, and a charged particle beam device using the same. This charged particle beam device comprises: a sample chamber for accommodating a sample that will serve as an object to be observed therein; a column that is disposed on an upper portion of the sample chamber and irradiates and scans the sample with a charged particle beam generated by a charged particle source; and a vibration-suppressing mechanism that is removably provided to the column, said particle beam device being characterized in that the vibration-suppressing mechanism includes a stator affixed to the column, an annular mover that is supported so as to be movable in a direction orthogonal to the axial direction of the column, a plurality of actuators that cause the mover to vibrate in the direction orthogonal to the axial direction of the column, a plurality of vibration sensors affixed to the stator, and a controller that controls the actuators according to output signals from the vibration sensors.

A micro-displacement amplifying apparatus comprises two sets of asymmetrical amplifying structures; each set of asymmetrical amplifying structure comprises a plurality of asymmetrical amplifying units connected in series by flexible hinges; the asymmetrical amplifying unit is used for amplifying a micro-displacement; the two sets of asymmetrical amplifying structures are in opposite positions and overlap with each other; the input end and output end are coupled to the asymmetrical amplifying unit by a flexible hinge, respectively; the input end is used for inputting the micro-displacement to the asymmetrical amplifying unit, and the output end is used for outputting the amplified displacement; the two contacting input ends are fixed and coupled to each other, and the two contacting output ends are fixed and coupled to each other. The present disclosure further discloses an amplification method of the micro-displacement amplifying apparatus.

The devices and systems described herein generally relate to programmable surfaces. A set of tiles in conjunction with actuators, allow for the surface to be constantly changeable from a first shape to an unlimited variety of second shapes. Once a desired second shape is achieved, the shape can be held by actuating the actuators. The system can include detection and maintenance of the shapes of the programmable surface by controlling which of the actuators are released and when they are released.

The present application provides a motor and an electronic device, where the motor includes a housing, a first electric vibration part, and a mass block; an accommodating cavity is disposed in the housing, the first electric vibration part and the mass block are disposed in the accommodating cavity, a first end of the first electric vibration part is connected to the housing, and a second end of the first electric vibration part is connected to the mass block; and when a voltage is applied to the first electric vibration part, the first electric vibration part drives the mass block to move.

A piezoelectric device includes a piezoelectric element, a mounting plate, an electronic element including a temperature sensor therein, a base on which the piezoelectric element is mounted with the mounting plate therebetween and on which the electronic element is mounted, and a lid joined to the base and hermetically sealing at least the piezoelectric element and the mounting plate.

A PM signal generator can generate a variable PM signal based on a position of a movable element of a MEMS motor. A bias voltage generator can provide a bias voltage to the MEMS motor. The bias voltage generator can include a reference signal generator that can generate a reference signal that varies based on variation of pulses of the PM signal. The bias voltage can be based on the reference signal.

A vibration actuator capable of reducing variations of pressure force and reaction force acting on a vibrator and a contact member has a specific construction. Vibrator devices respectively have vibrators, each of which includes an elastic member and an electro-mechanical energy conversion element. A contact member contacts the vibrators and is movable in a predetermined direction relatively to the vibrators. A restraint member fixes a first vibrator device among the vibrator devices to restrict a degree of freedom in the predetermined direction. A flexible member connects a second vibrator device among the vibrator devices to the first vibrator device. The flexible member has predetermined rigidity in the predetermined direction and has rigidity, which is lower than the predetermined rigidity, in directions other than the predetermined direction.

This application relates to a drive assembly, a motor, and a terminal. The drive assembly includes a stator and a rotor. The stator includes an excitation part, a vibration part, a first fixed part, and a pushing part. The vibration part is connected to the excitation part. The first fixed part is connected to the vibration part, and the vibration part is located between the excitation part and the first fixed part along a first direction L. The pushing part is connected to the vibration part and the rotor. The excitation part is capable of vibrating, and the excitation part is capable of driving the vibration part to act. Under limiting by the first fixed part, the vibration part is capable of vibrating at least along the first direction L and a second direction W.

A piezoelectric driving device includes a substrate, a plurality of piezoelectric elements disposed on the substrate, a first groove section provided between the plurality of piezoelectric elements, and a first wire provided in at least a part of a side surface and a bottom section of the first groove section.