Plasma processing systems and methods are disclosed. The plasma processing system includes a high-frequency generator configured to deliver power to a plasma chamber and a low-frequency generator configured to deliver power to the plasma chamber. A filter is coupled between the plasma chamber and the high-frequency generator, and the filter suppresses mixing products of high frequencies produced by the high-frequency generator and low frequencies produced by the low-frequency generator.

A band antenna EMP filter apparatus having HEMP protection capability is disclosed. The apparatus includes a discharging part, a band pass filtering part, and a residual current eliminating part. The discharging part primarily discharges a transient voltage due to a high altitude electromagnetic pulse (HEMP) when the HEMP is inputted through an input part receiving a radio frequency (RF) signal of an antenna. The band pass filtering part secondarily blocks a residual current primarily discharged by the discharging part and passes only a signal of a preset frequency band to output it through an output part. The residual current eliminating part limits a transient voltage of the HEMP by eliminating a residual current passing through the band pass filtering part.

Plasma processing systems and methods are disclosed. The plasma processing system includes a high-frequency generator configured to deliver power to a plasma chamber and a low-frequency generator configured to deliver power to the plasma chamber. A filter is coupled between the plasma chamber and the high-frequency generator, and the filter suppresses mixing products of high frequencies produced by the high-frequency generator and low frequencies produced by the low-frequency generator.

An EMI filter arrangement includes a noise source, an input filter connected to the input of the noise source, and an output filter connected to the output of the noise source, the noise source, input filter and output filter provided in an electrically conductive electronics box, and an input filter capacitor electrically connecting the input filter to the electrically conductive electronics box and an output filter capacitor electrically connecting the output filter to the electrically conductive electronics box; the arrangement characterised by further comprising an intermediate reference plane provided in the electrically conductive electronics box, and an intermediate capacitor provided in the electrically conductive electronics box electrically connected between the intermediate reference plane and the electrically conductive electronics box, the input filter capacitor and the output filter capacitor being electrically connected to the box via the intermediate reference plane and the intermediate capacitor.

A filter circuit includes a coil component, an inductor, and a capacitor. In the coil component, a first coil and a second coil are magnetically coupled. The inductor is electrically connected to a first end of the first coil and a second end of the second coil and is connected in parallel to the coil component. The capacitor is electrically connected between a ground electrode and an electrode electrically connected to a second end of the first coil and a second end of the coil.

An LC circuit includes a first capacitor provided between a first connection point and a second connection point, a second capacitor provided between the second connection point and a third connection point, a third capacitor provided between the third connection point and a fourth connection point, a fourth capacitor provided between the first connection point and the third connection point, a fifth capacitor provided between the second connection point and the fourth connection point, a first inductor connected to the second connection point, and a second inductor connected to the third connection point.

A DC filter device includes: a first filter device connection; a second filter device connection; a third filter device connection; a fourth filter device connection; a coil core; at least one first coil arranged on the coil core, the at least one first coil being connected in between the first filter device connection and the third filter device connection; at least one second coil arranged on the coil core, the at least one second coil being connected in between the second filter device connection and the fourth filter device connection; and a third coil arranged on the coil core, the third coil having a first coil connection and a second coil connection. The first coil connection and the second coil connection are connected to one another via a circuit device, which circuit device has a resistor.

In an embodiment an EMC filter component includes a first interface, a second interface, a filter circuit, a mechanical connection and a DC-Link capacitor as a circuit element, wherein the filter circuit is electrically connected between the first interface and the second interface, wherein the mechanical connection is configured for mechanically connecting the EMC filter component to an external mounting location, and wherein the mechanical connection is configured for electrically connecting the filter circuit to a ground potential of the external mounting location.

An inductor includes a first metallization layer multi-turn trace. The inductor also includes a second metallization layer multi-turn trace coupled to the first metallization layer multi-turn trace through at least one first via. The inductor further includes a plurality of discrete third metallization layer trace segments coupled to the second metallization layer multi-turn trace through a plurality of second vias.

A wide-bandwidth resonant circuit is provided. In an embodiment disclosed herein, the wide-bandwidth resonant circuit includes a positive resonant circuit coupled in parallel to a negative resonant circuit. The positive resonant circuit and the negative resonant circuit can be configured to collectively exhibit certain impedance characteristics across a wide bandwidth. As a result, it is possible to utilize the wide-bandwidth resonant circuit to support a variety of wide-bandwidth applications, such as in a wide-bandwidth signal filter circuit.