A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.

A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.

A micro-electro-mechanical-system (MEMS) device comprises an inertial component configured for being connected to a structure by a flexible connection allowing the inertial component to deform or move relative to the structure in response to an external stimulus applied to the structure. One or more resonant components are connected to the structure or inertial component, the resonant component(s) having resonant mode(s). Transduction unit(s) measures an oscillatory motion of the resonant component relative to the inertial component and/or structure. An electronic control unit applies a pump of electrostatic force to induce an oscillatory motion of the resonant component(s) in the resonant mode, the oscillatory motion being a non-linear function of a strength of the electrostatic force. The resonant component is configured to be coupled to the inertial component and/or the structure such that a deformation and/or motion of the inertial component in response to an external stimulus changes the strength of the pump, the electronic control unit configured for producing and outputting an output signal being a mathematical function of the measured oscillatory motion. A system for producing a neuromorphic output for a MEMS device exposed to external stimuli is also provided.

A MEMS resonator comprising a baseplate wafer; a piezoelectric HF-VHF resonator that comprises a monolithic piezoelectric member having at least two separate spring piezoelectric support members integrally extending therefrom, each spring piezoelectric support member having at least a rounded corner; said piezoelectric resonator being attached to the baseplate wafer by said support members; wherein said monolithic piezoelectric member comprises first and second main surfaces joined by side edges; at least one of said side edges forming an angle of between 90 and 105 degrees with one of the first and second main surfaces.

A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.

A resonator is formed from a unitary slab of a plate of quartz material which is KT cut with a theta cut angle between 20 and 35 degree, the unitary slab of a plate of quartz material having vertical side walls defining (i) an elongated central portion, the elongated central portion having a centerline along its major dimension, the elongated central portion resonating, in use, in an extensional mode disposed at a right angle to said centerline, (ii) a pair of isolating springs integrally connected to said central portion at the centerline thereof and (iii) first and second pairs of tethers, each one of the pairs tethers being integrally connected at a mid point of each the first and second pairs of tethers to ends of the isolating springs remote from the elongated central portion, each of the pairs tethers having two arms which wrap around the elongated central portion so that an end of one arm of the one of the tether approaches, but does not contact, an end of an arm of the another one of the tethers. The elongated central portion has two major opposing surfaces with a first pair of parallel electrodes disposed on one of the two opposing surfaces and with a second pair of parallel electrodes disposed on the other one of the two opposing surfaces. Interconnecting conductors disposed on the elongated central portion, on the isolating springs and on the first and second tethers, interconnecting conductors electrically connecting the first and second electrodes with pads located at the ends of the arms of said tethers.