A temperature sensor is a temperature sensor using a MEMS resonator, and includes: a MEMS resonator; a sweeper that sweeps a frequency of an excitation signal for a vibrator of the MEMS resonator in a predetermined sweep direction, and outputs the excitation signal swept to the MEMS resonator; a discontinuity point detector that obtains a vibration state information signal, which is a characteristic quantity expressing a vibration state of the vibrator based on the excitation signal, from the MEMS resonator, and detects a detection value that is (i) a frequency of the excitation signal when the vibration state information signal obtained changes discontinuously or (ii) a time corresponding to the frequency; and a converter that determines a physical quantity acting on the MEMS resonator based on the detection value detected.

A Microelectromechanical systems (MEMS) based ring resonator includes an outer ring which is supported in resilient deformable movement relative to one or more peripherally disposed electrodes by a symmetrically positioned array of radially extending inner spring supports. The inner spring supports extend radially from a central anchor post or support to the inner circumferential edge of the outer ring. The innerspring supports are configured to deformation or regulate movement in outer ring driving and sensing modes.

Nonlinear acoustic media and related methods are described herein. The nonlinear acoustic media are configured to generate higher harmonic output signals from a single-frequency input signal. The higher harmonic output signals can be generated through the coupling of an acoustic dielectric medium to a nonlinear piezoelectric medium having four ports.

A passband filter includes a first and second microelectromechanical resonator system, each including a resonating beam, a drive electrode, and a sense electrode. An AC input signal is coupled to the drive electrode of the first and second microelectromechanical resonator system. A differential-to-single ended amplifier has a first input and second input respectively coupled to the sense electrodes of the first and second microelectromechanical resonator systems. An output of the differential-to-single ended amplifier is an output of the passband filter that provides a bandpass filtered signal of the AC input signal. A DC bias signal is coupled to the resonating beams of the first and second microelectromechanical resonator systems. The first microelectromechanical resonator system exhibits a hardening nonlinear behavior defining an upper stop frequency of the passband and the second microelectromechanical resonator system exhibits a softening nonlinear behavior defining a lower stop frequency of the passband.

The invention relates to a method of manufacturing a plurality of mechanical resonators in a manufacturing wafer, the resonators being intended to equip a regulating member of a timepiece, the method comprising the following steps: (a) fabricating a plurality of resonators in at least one wafer according to reference specifications; (b) measuring the actual frequency of each of the plurality of resonators; (c) determining the offset of the actual frequency of the resonators with respect to the reference specifications; and (d) applying on at least one of the resonators at least two masses from a series of tuning masses to compensate the offset of the concerning resonator to bring the resonator closer to the reference specifications.

A MEMS (microelectromechanical system) resonator includes a first layer of single-crystalline silicon, a second layer of single-crystalline silicon, and a piezoelectric layer in between said first layer of single-crystalline silicon and the second layer of single-crystalline silicon. A manufacturing method of the MEMS resonator includes at least one of the interfaces between the single-crystalline silicon layers and the piezoelectric layer be made by wafer bonding.

A quartz crystal unit comprising a quartz crystal resonator having a base portion, and first and second tuning fork arms connected to the base portion, the base portion having a length less than 0.5 mm and greater than a spaced-apart distance between the first and second tuning fork arms, each of the first and second tuning fork arms having a width less than 0.1 mm and a length less than 1.56 mm, and a plurality of different widths including a first width and a second width greater than the first width, at least one groove being formed in at least one of opposite main surfaces of each of the first and second tuning fork arms so that a length of the at least one groove is within a range of 0.3 mm to 0.79 mm, the quartz crystal resonator being housed in a case, and a lid being connected to the case.

Three-dimensional (3D) micro-scale shells are presented with openings of various sizes and geometries on the surface. The shell consist of a suspended ring-shaped resonator, multiple support beams, a support post, and a cap region that connects the support beams to the support post. Shells with openings of various sizes and geometries allow the creation of micro electromechanical systems (MEMS) sensors and actuators with a wide range of engineered mechanical and electrical properties. The openings on the shell surface can, for example, control the mechanical quality factor (Q) and resonance frequencies of the shell when the shell is used as a suspended proof mass of a mechanical resonator of a vibratory gyroscope. The shells can also serve as mechanical supporting layers and/or an electrode connection layer for MEMS actuators and sensors that use 3D shells as proof masses.

A vibration member is provided that includes a base with front and rear ends opposite to each other, and vibration arms fixed to the front end, extending away therefrom, and including at least one first vibration arm and a pair of second vibration arms positioned on both sides of a first vibration arm group including the at least one first vibration arm in a direction intersecting a longitudinal direction. A holding arm is provided that has one end connected to the base and the other end connected to a frame. A plurality of vibration portions include a piezoelectric film, and a lower electrode and an upper electrode that sandwich the piezoelectric film. A connection wiring line that connects the respective upper electrodes of the pair of second vibration arms to each other is provided in a region of at least either of the base or the holding arm.

A resonator is provided that includes a vibration member including three or more vibration arms that each have a fixed end with at least two vibration arms performing out-of-plane bending at different phases. The resonator also includes a base having a front end connected to the fixed end of each of the vibration arms and a rear end opposing the front end. A frame holds the vibration member and two support arms are provided with first ends connected to the frame. The second ends of the two support arms are connected to a location in the rear end of the base.