A device includes a stack of at least two piezoelectric layers configured to propagate a Lamb wave in a mode having an order corresponding to a number of piezoelectric layers of the stack. The stack includes a first piezoelectric layer and a second piezoelectric layer disposed on the first piezoelectric layer. The first piezoelectric layer has a first cut plane orientation, and the second piezoelectric layer has a second cut plane orientation complementary to the first cut plane orientation. The device further includes an interdigitated transducer (IDT) disposed on at least a top surface of the stack or a bottom surface of the stack. In some embodiments, the device is an acoustic resonator. In some embodiments, the device is an acoustic delay line.

A device includes a stack of at least two piezoelectric layers configured to propagate a Lamb wave in a mode having an order corresponding to a number of piezoelectric layers of the stack. The stack includes a first piezoelectric layer and a second piezoelectric layer disposed on the first piezoelectric layer. The first piezoelectric layer has a first cut plane orientation, and the second piezoelectric layer has a second cut plane orientation complementary to the first cut plane orientation. The device further includes an interdigitated transducer (IDT) disposed on at least a top surface of the stack or a bottom surface of the stack. In some embodiments, the device is an acoustic resonator. In some embodiments, the device is an acoustic delay line.

Embodiments of the invention include a waveguide structure that includes a first piezoelectric transducer that is positioned in proximity to a first end of a cavity of an organic substrate. The first piezoelectric transducer receives an input electrical signal and generates an acoustic wave to be transmitted with a transmission medium. A second piezoelectric transducer is positioned in proximity to a second end of the cavity. The second piezoelectric transducer receives the acoustic wave from the transmission medium and generates an output electrical signal.

Digital phase shifters are provided herein. A digital phase shifter includes first and second multi-throw RF switches that are coupled to each other by a plurality of delay lines having different respective lengths. In some embodiments, at least four delay lines couple the first and second multi-throw RF switches to each other. Related methods of operation are also provided.

Digital phase shifters are provided herein. A digital phase shifter includes first and second multi-throw RF switches that are coupled to each other by a plurality of delay lines having different respective lengths. In some embodiments, at least four delay lines couple the first and second multi-throw RF switches to each other. Related methods of operation are also provided.

A CMOS compatible GHz ultrasonic pulse/echo transmit-receive ultrasonic delay element demonstrating less than <6 ppm stability over time and having a zero-temperature coefficient of delay at two temperatures. The delay element includes one or more CMOS compatible piezoelectric transducers requiring no release step, which transmit and/or receive a GHz-ultrasonic wave packet. The bulk substrate exhibits low loss for the GHz-ultrasonic wave packet transmitted through the substrate and uses the phenomenon of diffraction to retrieve multiple reflections.

A CMOS compatible GHz ultrasonic pulse/echo transmit-receive ultrasonic delay element demonstrating less than <6 ppm stability over time and having a zero-temperature coefficient of delay at two temperatures. The delay element includes one or more CMOS compatible piezoelectric transducers requiring no release step, which transmit and/or receive a GHz-ultrasonic wave packet. The bulk substrate exhibits low loss for the GHz-ultrasonic wave packet transmitted through the substrate and uses the phenomenon of diffraction to retrieve multiple reflections.

A sequentially switched bulk acoustic wave (BAW) delay line circulator is disclosed herein. A circulator circuit is implemented with semiconductor components in order to provide a compact, low cost solution for simultaneous signal transmission and reception over a single antenna. For example, the circulator circuit can include a transmit (TX) port, a receive (RX) port, and an antenna port. Antenna switching circuitry selectively couples the antenna port to two or more BAW delay lines, and TX/RX switching circuitry selectively couples the BAW delay lines to the TX port or the RX port. The BAW delay lines function as memory to store TX and RX signals long enough for the antenna switching circuitry, a TX switch, and a RX switch to be switched in sequence and route the TX signals from the TX port to the antenna port and route the RX signals from the antenna port to the RX port.

A sequentially switched bulk acoustic wave (BAW) delay line circulator is disclosed herein. A circulator circuit is implemented with semiconductor components in order to provide a compact, low cost solution for simultaneous signal transmission and reception over a single antenna. For example, the circulator circuit can include a transmit (TX) port, a receive (RX) port, and an antenna port. Antenna switching circuitry selectively couples the antenna port to two or more BAW delay lines, and TX/RX switching circuitry selectively couples the BAW delay lines to the TX port or the RX port. The BAW delay lines function as memory to store TX and RX signals long enough for the antenna switching circuitry, a TX switch, and a RX switch to be switched in sequence and route the TX signals from the TX port to the antenna port and route the RX signals from the antenna port to the RX port.

A sequentially switched bulk acoustic wave (BAW) delay line circulator is disclosed herein. A circulator circuit is implemented with semiconductor components in order to provide a compact, low cost solution for simultaneous signal transmission and reception over a single antenna. For example, the circulator circuit can include a transmit (TX) port, a receive (RX) port, and an antenna port. Antenna switching circuitry selectively couples the antenna port to two or more BAW delay lines, and TX/RX switching circuitry selectively couples the BAW delay lines to the TX port or the RX port. The BAW delay lines function as memory to store TX and RX signals long enough for the antenna switching circuitry, a TX switch, and a RX switch to be switched in sequence and route the TX signals from the TX port to the antenna port and route the RX signals from the antenna port to the RX port.