A positioning device for a radio frequency matcher comprises mainly a micro controller, and at least two detecting elements connected to the micro controller. The detecting elements are disposed on electric motors to detect the rotation angles of the electric motors. When the electric motors adjust the positions of the moving pieces of the tuning elements based on the volume of error signals to change the electrical reactance values so that they may approximately meet the requirement of the radio frequency load and that the radio frequency load may achieve a highest possible power, the micro controller may interpret the signals of the rotation angle detecting elements and output the interpreted values for a user to determine whether the moving pieces of the tuning elements are at right positions to approximately meet the requirement of the radio frequency load and maximize the power of the radio frequency load of the radio frequency matcher.

A positioning device for a radio frequency matcher comprises mainly a micro controller, and at least two detecting elements connected to the micro controller. The detecting elements are disposed on electric motors to detect the rotation angles of the electric motors. When the electric motors adjust the positions of the moving pieces of the tuning elements based on the volume of error signals to change the electrical reactance values so that they may approximately meet the requirement of the radio frequency load and that the radio frequency load may achieve a highest possible power, the micro controller may interpret the signals of the rotation angle detecting elements and output the interpreted values for a user to determine whether the moving pieces of the tuning elements are at right positions to approximately meet the requirement of the radio frequency load and maximize the power of the radio frequency load of the radio frequency matcher.

A positioning device for a radio frequency matcher comprises mainly a micro controller, and at least two detecting elements connected to the micro controller. The detecting elements are disposed on electric motors to detect the rotation angles of the electric motors. When the electric motors adjust the positions of the moving pieces of the tuning elements based on the volume of error signals to change the electrical reactance values so that they may approximately meet the requirement of the radio frequency load and that the radio frequency load may achieve a highest possible power, the micro controller may interpret the signals of the rotation angle detecting elements and output the interpreted values for a user to determine whether the moving pieces of the tuning elements are at right positions to approximately meet the requirement of the radio frequency load and maximize the power of the radio frequency load of the radio frequency matcher.

A positioning device for a radio frequency matcher comprises mainly a micro controller, and at least two detecting elements connected to the micro controller. The detecting elements are disposed on electric motors to detect the rotation angles of the electric motors. When the electric motors adjust the positions of the moving pieces of the tuning elements based on the volume of error signals to change the electrical reactance values so that they may approximately meet the requirement of the radio frequency load and that the radio frequency load may achieve a highest possible power, the micro controller may interpret the signals of the rotation angle detecting elements and output the interpreted values for a user to determine whether the moving pieces of the tuning elements are at right positions to approximately meet the requirement of the radio frequency load and maximize the power of the radio frequency load of the radio frequency matcher.

According to an embodiment, a control apparatus includes a shaper and a compensator. The shaper receives a first target value in position control of a controlled object and generates a second target value which changes substantially rampwise over a time equal to or shorter than a period corresponding to one of resonance frequencies of the controlled object until the second target value becomes equal the first target value. The compensator compensates for a control signal, used for controlling the controlled object, based on the second target value.

According to an embodiment, a control apparatus includes a shaper and a compensator. The shaper receives a first target value in position control of a controlled object and generates a second target value which changes substantially rampwise over a time equal to or shorter than a period corresponding to one of resonance frequencies of the controlled object until the second target value becomes equal the first target value. The compensator compensates for a control signal, used for controlling the controlled object, based on the second target value.

High reliability impedance tuners used in high power measurements suffer fast heating and consequently thermal expansion of the central conductor, which has a very small mass and is thermally isolated from the tuner housing. This leads to false measurements or catastrophic tuner failure (short) of either the DUT or the tuner. A method is introduced for allowing the center conductor to expand linearly without deforming and risking loss of accuracy first and catastrophic failure later. Practical tests have shown significant thermal behavior improvement.

High reliability impedance tuners used in high power measurements suffer fast heating and consequently thermal expansion of the central conductor, which has a very small mass and is thermally isolated from the tuner housing. This leads to false measurements or catastrophic tuner failure (short) of either the DUT or the tuner. A method is introduced for allowing the center conductor to expand linearly without deforming and risking loss of accuracy first and catastrophic failure later. Practical tests have shown significant thermal behavior improvement.