H04N5/3722

Sensor with electrically controllable aperture for inspection and metrology systems

Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

Multimode photosensor

A multimode interline charge coupled device having an array of light sensitive pixels, each configured to accumulate photocharge responsive to light incident on the pixel, and a controller configured to allocate a first portion of the pixels to accumulate photocharge responsive to light from a scene during a plurality of exposure periods and allocate a second portion of the pixels to store photocharge accumulated by pixels in the first portion to provide a plurality of images of the scene greater than two.

Sensor With Electrically Controllable Aperture For Inspection And Metrology Systems

Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

Sensor with electrically controllable aperture for inspection and metrology systems

Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

METHODS FOR CLOCKING AN IMAGE SENSOR

A method of clocking an image sensor which eliminates well bounce effects caused by global current flow in large image sensors during frame readout and line transfer is described. During charge transfer operations in which voltages are applied to VCCD gate contacts that are adjacent to the photodiodes, a compensating voltage may be applied to the lightshield that is associated with, and at least partially formed over the photodiode. Depending on polarity, the compensating lightshield pulse allows holes to locally flow from under the VCCD gates to the photodiode P+ pinning region or vice-versa, and in such a manner to eliminate the global flow of hole current. Lightshields may also be biased during electronic shuttering operations.