A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.

The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone. In the process, one electrically conductive layer is deposited on a removable layer, and then divided or cut into two divided layers, both of which remain in contact with the removable layer as they were. One of the two divided layers will become or include a movable or deflectable membrane/diaphragm that moves in a lateral manner relative to another layer, instead of moving toward/from another layer. A motional sensor is optionally fabricated within the microphone to estimate the noise introduced from acceleration or vibration of the microphone for the purpose of compensating the microphone output through a signal subtraction operation.

A sensor assembly including a capacitive sensor, like a microelectromechanical (MEMS) microphone, and an electrical circuit therefor are disclosed. The electrical circuit includes a first transistor having an input gate connectable to the capacitive sensor, a second transistor having an input gate coupled to an output of the first transistor, a feedforward circuit interconnecting a back-gate of the second transistor and the output of the first transistor, and a filter circuit interconnecting the output of the first transistor and the input gate of the second transistor.

A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.

A micro-electro mechanical device includes a casing, a vibration sensor, a vibration membrane assembly, and a micro-electro mechanical microphone. The casing has a sound-receiving hole, and the vibration sensor is disposed in the casing. The vibration membrane assembly is disposed in the casing and corresponds to the vibration sensor. The micro-electro mechanical microphone is disposed in the casing and corresponds to the sound-receiving hole, and a back cavity of the micro-electro mechanical microphone is formed in the casing. The back cavity at least partially overlaps with areas corresponding to a vertical projection of the vibration membrane assembly.

Disclosed embodiments provide flexible performance, high dynamic range, microelectromechanical (MEMS) multipath digital microphones, which allow seamless, low latency transitions between audio signal paths without audible artifacts over interruptions in the audio output signal. Disclosed embodiments facilitate performance and power saving mode transitions maintaining high dynamic range capability.

According to the present invention, a diaphragm is disposed on a yoke. A recess is formed in the upper surface of the diaphragm. A first metal plate is disposed in the recess. A permanent magnet is disposed on the approximate center of the first metal plate. A second metal plate is disposed on the permanent magnet. The sizes of the first metal plate and the second metal plate are greater than that of the permanent magnet. That is, with respect to the permanent magnet, the first metal plate and the second metal plate are disposed so as to protrude outward beyond the permanent magnet in the longitudinal direction.

A sound control system for dental treatment, includes: ear-worn speakers equipped to be worn by a patient in the dentist; a microphone that converts, into an electrical signal, a sound including the voice of a medical staff in charge of the patient; a voice recognition module for recognizing the voice of the medical staff in charge from an electrical sound signal input from the microphone; a sound source module that stores a plurality of sound sources for mental and physical stability of the patient; a user interface including a sound source selection unit that allows the patient to select a play sound source provided via the ear-worn speakers from among the plurality of sound sources; and an output signal generation module for generating an output sound signal output via the ear-worn speakers.

A sound processor comprises one or more electrical signal outputs configured to generate a plurality of electrical signals. The plurality of electrical signals are generated in specific tuned audio frequency bands in respective audio channels, in response to sound information received at the sound processor in the specific tuned audio frequency bands. The sound processor further comprises a transmitter coupled to the one or more electrical signal outputs for transmission of the plurality of electrical signals. The transmitter is configured to transmit the electrical signal in the respective audio channel over a separate respective transcutaneous communication link.

The sound detection device comprises a substrate, an array of sound detectors in or on a surface of the substrate, a processing circuit coupled to the sound detectors, the processing circuit being configured to sum signals from the sound detectors with relative time delays or phase shifts that compensate for propagation delay of sound along the array in a sound propagation mode that is bound to said surface. In an embodiment the sound in said sound propagation mode is bound to the surface using an acoustic waveguide, wherein the surface of the substrate forms a part of the acoustic waveguide, the sound detection device comprising a wall facing the array of sound detectors, with a space between the surface of the substrate and the wall, the sound detection device comprising an opening that provides incoming sound from outside the device access to said space, for excitation of the wave in the bound propagation mode in the acoustic waveguide by sound from outside the device.