A mounting table is provided. The mounting table includes an electrostatic chuck configured to mount thereon a target object and attract and hold the target object using an electrostatic force, and a gas supply line configured to supply a gas to a gap between the target object mounted on the electrostatic chuck and the electrostatic chuck via the electrostatic chuck. The mounting table further includes at least one irradiation unit configured to irradiate light having a predetermined wavelength to the gas flowing through the gas supply line or to the gas supplied to the gap between the target object and the electrostatic chuck to ionize the gas.

A mounting table is provided. The mounting table includes an electrostatic chuck configured to mount thereon a target object and attract and hold the target object using an electrostatic force, and a gas supply line configured to supply a gas to a gap between the target object mounted on the electrostatic chuck and the electrostatic chuck via the electrostatic chuck. The mounting table further includes at least one irradiation unit configured to irradiate light having a predetermined wavelength to the gas flowing through the gas supply line or to the gas supplied to the gap between the target object and the electrostatic chuck to ionize the gas.

An attraction system of an amusement park includes a sensor configured to monitor electrostatic buildup associated with the attraction system and a control system communicatively coupled to the sensor. The control system is configured to receive data from the sensor, the data being indicative of an amount of the electrostatic buildup associated with the attraction system, and operate the attraction system based on the data indicative of the amount of the electrostatic buildup associated with the attraction system.

Automatic emitter point cleaners are disclosed. An automatic emitter point cleaning system includes: a fan configured to direct a stream of air through an air path; a point emitter configured to produce at least one of positive ions or negative ions within or proximate to the air path; a brush; a first gear coupled to the brush and configured to move the brush into contact with the point emitter; a second gear to engage the first gear; and a motor to actuate the second gear such that the second gear actuates the first gear to move the brush past the point emitter.

A detection and charge neutralization device comprises a vacuum chamber, an electrical optical system, and a charge neutralization member. The electrical optical system and the charge neutralization member are disposed inside the vacuum chamber. The electrical optical system, outputs a charged particle beam to an observation position of the vacuum chamber. The charge neutralization member provides a focused vacuum ultraviolet light to the observation position to neutralize the accumulating charges.

A detection and charge neutralization device comprises a vacuum chamber, an electrical optical system, and a charge neutralization member. The electrical optical system and the charge neutralization member are disposed inside the vacuum chamber. The electrical optical system, outputs a charged particle beam to an observation position of the vacuum chamber. The charge neutralization member provides a focused vacuum ultraviolet light to the observation position to neutralize the accumulating charges.

An example apparatus for charge neutralization includes: a first emitter nozzle; a power supply configured to supply a high frequency alternating current (AC) signal to the first emitter nozzle; control circuitry configured to: provide a polarity signal to the power supply to generate a DC offset signal, wherein a combination of the high frequency AC signal and the DC offset signal causes the power supply to output a positive ion generation pulse or a negative ion generation pulse; control the polarity signal to cause the power supply to provide a period of positive ion generation and a period of negative ion generation; determine a balance voltage at an output of the first emitter nozzle; and control the polarity signal to adjust a relative durations of the period of positive ion generation and the period of negative ion generation based on the balance voltage.

An example apparatus for charge neutralization includes: a first emitter nozzle; a power supply configured to supply a high frequency alternating current (AC) signal to the first emitter nozzle; control circuitry configured to: provide a polarity signal to the power supply to generate a DC offset signal, wherein a combination of the high frequency AC signal and the DC offset signal causes the power supply to output a positive ion generation pulse or a negative ion generation pulse; control the polarity signal to cause the power supply to provide a period of positive ion generation and a period of negative ion generation; determine a balance voltage at an output of the first emitter nozzle; and control the polarity signal to adjust a relative durations of the period of positive ion generation and the period of negative ion generation based on the balance voltage.

A pick-up device 10 for picking up a semiconductor chip 100 attached to a front surface of a sheet material 110 is provided with: a stage 12 that includes a material a part or the entirety of which is capable of transmitting a destaticizing electromagnetic wave having an ionization effect and that attracts and holds a rear surface of the sheet material 110; a jacking-up pin 26 for jacking up the semiconductor chip 100 from the rear side of the stage 12; and a destaticizing mechanism 20 that destaticizes charge generated between the semiconductor chip 100 and the sheet material 110 by irradiating the rear surface of the semiconductor chip 100 with the destaticizing electromagnetic wave that is made to pass through the sheet material 110 from the rear side of the stage 12.

A pick-up device 10 for picking up a semiconductor chip 100 attached to a front surface of a sheet material 110 is provided with: a stage 12 that includes a material a part or the entirety of which is capable of transmitting a destaticizing electromagnetic wave having an ionization effect and that attracts and holds a rear surface of the sheet material 110; a jacking-up pin 26 for jacking up the semiconductor chip 100 from the rear side of the stage 12; and a destaticizing mechanism 20 that destaticizes charge generated between the semiconductor chip 100 and the sheet material 110 by irradiating the rear surface of the semiconductor chip 100 with the destaticizing electromagnetic wave that is made to pass through the sheet material 110 from the rear side of the stage 12.