The current disclosure relates to a suppressor circuit configuration for extending the stable region of operation of a DC driven micro plasma discharge at atmospheric and higher pressures.

An apparatus for measurement of Thomson scattering signals from a plasma includes a light emitting device, configured to emit a light beam into the plasma, along an axis. In addition, the apparatus includes a collector configured to collect the Thomson scattering from the plasma at an angle less than 90 degrees from the axis of the light beam. Further, the apparatus includes a sensor assembly to detect the Thomson scattering.

An RF sensing apparatus configured for use with a plasma processing chamber includes a penetration unit opened in an up/down direction, a main return path unit surrounding all or a portion of the penetration unit, and a secondary return path unit located between the penetration unit and the main return path unit, spaced apart from the main return path unit, and surrounding all or a portion of the penetration unit. The main return path unit and the secondary return path unit include a path through which a current flows in one of the up/down directions.

A system for modeling a collisional plasma particles distribution is provided. The system includes an input beam generator configured to generate an input beam having a first set of values of a parameter modelling an initial distribution of particles in a collisional plasma, a non-linear optical medium configured to receive the input beam and produce a complex response function in response to receiving the input beam, an output detector configured to detect a second set of values of the parameter responsive to propagation of the input beam through the non-linear medium to the output detector, a feedback module configured to modify one or more properties of the non-linear optical medium, and a controller configured to select the first set of values, receive the second set of values, and determine, based on the first set and the second set of values, a final distribution of the particles in the collisional plasma.

A system for modeling a collisional plasma particles distribution is provided. The system includes an input beam generator configured to generate an input beam having a first set of values of a parameter modelling an initial distribution of particles in a collisional plasma, a non-linear optical medium configured to receive the input beam and produce a complex response function in response to receiving the input beam, an output detector configured to detect a second set of values of the parameter responsive to propagation of the input beam through the non-linear medium to the output detector, a feedback module configured to modify one or more properties of the non-linear optical medium, and a controller configured to select the first set of values, receive the second set of values, and determine, based on the first set and the second set of values, a final distribution of the particles in the collisional plasma.

An RF sensing apparatus configured for use with a plasma processing chamber includes a penetration unit opened in an up/down direction, a main return path unit surrounding all or a portion of the penetration unit, and a secondary return path unit located between the penetration unit and the main return path unit, spaced apart from the main return path unit, and surrounding all or a portion of the penetration unit. The main return path unit and the secondary return path unit include a path through which a current flows in one of the up/down directions.

The current disclosure relates to a suppressor circuit configuration for extending the stable region of operation of a DC driven micro plasma discharge at atmospheric and higher pressures. The current disclosure also provides various systems for suppressing a self-pulsing regime of a direct current driven micro plasma discharge comprising, at least, a power supply, a ballast resistor, a plasma discharge, and an inductor.

A measurement apparatus for alternating currents and voltages of a physical plasma ignited by applying an alternating high voltage from an alternating high voltage source to a plasma electrode via a high voltage line comprises a current transformer having a measurement winding on a ring core and a cable guide guiding the high voltage line through the ring core. A first measurement alternating voltage dropping over a measurement resistor connected between ends of the measurement winding is a first strictly monotonic increasing function of an amperage of the alternating currents flowing through the high voltage line. A second measurement voltage dropping over a measurement capacitance connected between a center tap of the measurement winding and a reference potential connector is a second strictly monotonic increasing function of an amplitude of the alternating high voltage applied to the plasma electrode with respect to a reference potential at the reference potential connector.

An apparatus for measurement of Thomson scattering signals from a plasma includes a light emitting device, configured to emit a light beam into the plasma, along an axis. In addition, the apparatus includes a collector configured to collect the Thomson scattering from the plasma at an angle less than 90 degrees from the axis of the light beam. Further, the apparatus includes a sensor assembly to detect the Thomson scattering.

The present invention relates to a method for manufacturing a tracer-encapsulated solid pellet for magnetic-confinement fusion, the method comprising a liquid droplet formation step of discharging an organic liquid containing an organic solvent into a stabilizing liquid to thereby form liquid droplets 12, and an organic solvent removal step of removing the organic solvent from the liquid droplets 12A. The organic liquid to be used is a liquid having a first organic polymer containing tracer atoms and a second organic polymer being an organic polymer different from the first organic polymer dissolved in the organic solvent, wherein the first organic polymer and the second organic polymer can be mutually phase-separated.