A plasma compression driver is connected to a plasma containment vessel containing a liquid medium that forms a liquid liner containing plasma, and comprises a pair of coaxially aligned pistons that are sequentially driven towards the liquid liner. A pusher bore containing a pusher piston is coaxial with and has a smaller diameter than a driver bore containing a driver piston such that an interconnecting annular face surface is defined at the junction of the driver and pusher bores. During the compression operation, a prime mover accelerates the driver piston towards the pusher piston and compresses a compression fluid, which accelerates the pusher piston and pushes the liquid medium in the pusher bore into the vessel, causing the liquid liner to collapse, and compressing the plasma. Outward forces on the vessel wall caused by compression driver recoil and increased vessel pressure is counteracted by an inward force applied by the compression fluid on the annular face surface during the compression operation.

A plasma compression driver is connected to a plasma containment vessel containing a liquid medium that forms a liquid liner containing plasma, and comprises a pair of coaxially aligned pistons that are sequentially driven towards the liquid liner. A pusher bore containing a pusher piston is coaxial with and has a smaller diameter than a driver bore containing a driver piston such that an interconnecting annular face surface is defined at the junction of the driver and pusher bores. During the compression operation, a prime mover accelerates the driver piston towards the pusher piston and compresses a compression fluid, which accelerates the pusher piston and pushes the liquid medium in the pusher bore into the vessel, causing the liquid liner to collapse, and compressing the plasma. Outward forces on the vessel wall caused by compression driver recoil and increased vessel pressure is counteracted by an inward force applied by the compression fluid on the annular face surface during the compression operation.

A microwave-plasma disinfector (Origreen) with a microwave source with multi-feed points and variable output power. It also has a low-temperature atmospheric-pressure plasma source. This versatile microwave-plasma disinfector has the ability to decontaminate heat-sensitive materials by subjecting them to a microwave-assisted plasma with controlled microwave power. This dual-action, at suitable non-destructive microwave and plasma doses, sterilizes the equipment at a lower temperature with higher effectiveness than either plasma or microwaves alone

A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.

A device for the containment, mixing, acceleration, and controlled release of fast-flowing ionized fluids or plasma, consisting of a grooved sphere with interior and surface electromagnets of opposing polarity and variable power output. The grooves within the device allow for extremely high rates of ionized fluid/plasma flow and mixing of either the same or differing compositions for each groove, depending upon the materials injected into them, and for the release of accelerated ionized fluid/plasma instantaneously and simultaneously (with all grooves depressurizing synchronously and unidirectionally), gradually and simultaneously (with all grooves gradually depressurizing at the same or different rates), or non-simultaneously and gradually or instantaneously (with the grooves depressurizing at different rates and times). The invention also provides a means of slowing ionized fluid/plasma flow within the grooves by way of the magnetohydrodynamic effect, which offers the potential for partial power recovery.

Adjustable distal tips of cold plasma generating devices configured for introduction to and operation within narrow intra-body confines. In some embodiments, a plasma delivery tip of a cold plasma generating device is expandable from a compact delivery configuration, allowing device operation with plasma plume parameters difficult to achieve within size constraints of a narrow delivery catheter and/or endoscope working channel. Additionally or alternatively, in some embodiments, operating parameters of a plasma delivery tip are adjustable to tune characteristics of the plasma plume. Adjustable parameters optionally include, for example: lumen diameter, lumen aperture shape/direction, discharge electrode geometry, dielectric barrier characteristics, and/or relative placement of these components, including placement relative to a stream of ionizing gas. In some embodiments, plasma delivery tip elements are adapted to assist device navigation and/or tissue penetration.

A plasma filter for treating a gas flow therethrough. The filter has a dielectric barrier plasma electrode assembly including a plurality of electrodes having a dielectric barrier layer coated thereon. The dielectric barrier plasma electrode assembly is configured to produce an atmospheric pressure plasma, A filtration medium is disposed on or between the electrodes, and a photocatalytic material is formed on surfaces of the filtration medium. Upon operation of the plasma filter, the plasma infiltrates voids in the filtration medium, and the gas flow through the filtration medium a) is exposed to reactive species of the plasma, b) interacts with the catalytic material, and c) is exposed to light generated from the plasma.

A system for surface treatment of a cylindric workpiece using an atmospheric pressure plasma generator according to an embodiment of the present disclosure includes a rotary plasma generator including a nozzle from which plasma is discharged, and a body to and from which the nozzle is attached and detached, and a plasma beam guide tap attached to one side of the nozzle about a rotation axis of the nozzle, in which the plasma beam guide tap is configured to discharge a plasma beam to at least a portion of a side of the workpiece while a rotation axis of the rotary plasma generator is aligned with a central axis of the cylindric workpiece.

In a method of manufacturing a semiconductor device a semiconductor wafer is retrieved from a load port. The semiconductor wafer is transferred to a treatment device. In the treatment device, the surface of the semiconductor wafer is exposed to a directional stream of plasma wind to clean a particle from the surface of the semiconductor wafer. The stream of plasma wind is generated by an ambient plasma generator and is directed at an oblique angle with respect to a perpendicular plane to the surface of the semiconductor wafer for a predetermined plasma exposure time. After the cleaning, a photo resist layer is disposed on the semiconductor wafer.

A sensor system and method of reducing plasma-induced communication inhibition for a main antenna includes using auxiliary antennas for detecting a density of plasma that affects operation of the main antenna, and re-orienting an electromagnetic field around the main antenna in response to the density detected to reduce effect of the plasma on the main antenna. The auxiliary antennas are also operable for data link communication and switchable such if the density of the plasma inhibits receipt or sending of signals by one of the auxiliary antennas, another one of the auxiliary antennas may be used for data link communication.